Researcher Database

（Last updated : 2024-01-22 11:06:07）

MURATA Junji

Department / Course College of Science and Engineering Department of Mechanical Engineering

Title / Position Professor

Other Affiliations
1.	Graduate School of Science and Engineering

Academic background
1.	～2010/03	Doctoral Program (2nd Semester) │ Department of precision science and technology │ Graduate school of engineering │ Osaka University │ Completed Ph. D in engineering
2.	～2005/03	Department of precision science and technology │ Faculty of Engineering │ Osaka University │ Graduated

Research activities
1.		The Japan society for precision engineering

Subject of research
1.	Development of functional particles for precision machining
2.	Liquid electrolyte free electrochemical machining using solid polymer electrolyte
3.	Photo-enhanced electrochemical polishing for semiconductor surfaces

Research summary
Ultra-precision surface processing utilizing physical/chemical reaction Surface processing for functional materials such as semiconductors, ceramics and optical materials is essential to achieve high-performance electronic/optical devices. However, owing to their high mechanical hardness and chemical stability, such materials are generally difficult to be processed by conventional surface machining method. In our research, novel surface preparation methods are developed utilizing physical/chemical reactions occurred on the material surface. The physical/chemical reaction including electrochemical, tribo-chemical, and catalyst-enhanced chemical reaction are employed to remove material surface with an atomic/molecular level accuracy, and thus the ultra-precision machined surface can be obtained. Furthermore, functional particles such as multi-component magnetic particles, SPE (solid polymer electrolyte)-coated particles are also developed to polish or etch material surfaces with nano/micro accuracy. By developing new processing methods that offer superior efficiency and accuracy to the conventional machining method, we can contribute to a promotion of the energy-saving and environment-friendly society.

Present specialized field
Thin film/Surface and interfacial physical properties, Production engineering/ Processing studies (Keyword：Precision machining, polishing, non-conventional machining)

Papers
1.	2024/01/17	Cu Direct Nanopatterning Using Solid-State Electrochemical Dissolution at the Anode/Polymer Electrolyte Membrane Interface │ Advanced Materials Interface │ (Co-authored)
2.	2023/07	Environment-friendly electrochemical mechanical polishing using solid polymer electrolyte/CeO2 composite pad for highly efficient finishing of 4H-SiC (0001) surface │ Applied Surface Science │ 625,pp.157190 (Co-authored)
3.	2022/12	Improvement in the polishing characteristics of titanium-based materials using electrochemical mechanical polishing │ Surfaces and Interfaces │ 35,pp.102490 (Co-authored)
4.	2022/03/15	Direct micropatterning on a titanium surface through electrochemical imprint lithography with a polymer electrolyte membrane stamp │ Microelectronic Engineering │ 257,pp.111752 (Co-authored)
5.	2021/11	High-efficiency wafer-scale finishing of 4H-SiC (0001) surface using chemical-free electrochemical mechanical method with a solid polymer electrolyte │ Diamond and Related Materials │ (120),pp.108700 (Co-authored)
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Winning science prize
1.	2009/11	JSPE prize best paper award (3rd International Conference of Asian Society for Precision Engineerign and Nanotechnology)

Acquisition patent
1.		Catalyst-aided chemical processing method and apparatus （US Pat. 7651625）