Researcher Database

（Last updated : 2022-02-17 11:22:00）

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SHIMIZU MASAO

Department / Course Research Organization of Science and Technology

Title / Position Professor

Papers
1.	1996	Deep Via Inspection Method Using Absorbed Electron Images (AEI) │ Proceeding of the 5th International Symposium on Semiconductor Manufacturing │ (Co-authored)
2.	2001	Lifetime of metastable fluorine atoms │ Appl. Phys. B │ (72),pp.227–230 (Co-authored)
3.	2006	Lifetime measurement of metastable fluorine atoms using electron cyclotron resonance plasma source │ J. Vac. Sci. Tech A │ 24 (6),pp.2133-2138 (Co-authored)

Academic conference presentation
1.	2021	Cyber Physical System Considering Physical Contacts in Robotic Manipulation for Improving Automation in Food Industry (ICSIM 2021)

Acquisition patent
1.	2002	US PAT, Dry Etching Method and Apparatus, US6355569B1,Mar.12.2002.
2.	2020/10/27	FORCE DETECTOR （US10816417B2）