Researcher Database

（Last updated : 2021-03-31 20:04:17）　

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SUGIYAMA Susumu

Department / Course Research Organization of Science and Technology

Title / Position Visiting Senior Researcher

Other Affiliations
1.	Research Organization of Science and Technology SR Center

Academic background
1.	1994/05 Degree Acquisition	│ Tokyo Institute of Technology Doctor of Engineering
2.		│ Tokyo Institute of Technology
3.	～1970	Department of Electric Engineering │ Faculty of Science and Engineering │ Meijo University

Business career
1.	2008/04/01	Professor │ │ Ritsumeikan Univ
2.	2007/04/01 ～ 2008/03/31	Professor │ The Organization for the Promotion of the COE Program, │ Ritsumeikan Univ
3.	1995/04/01 ～ 2007/03/31	Professor │ Dept. of Science and Engineering, │ Ritsumeikan Univ
4.	2000/12/01 ～ 2010/12/31	Director │ Research Inst. for Nanomachine SystemTechnology │ Ritsumeikan Univ.
5.	1998/04/01 ～ 2002/03/31	Vice Derector │ SR(Synchrotron Radiation) Center, │ Ritsumeikan Univ.
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Committee and society
1.	1995/05 ～ 2012	MYU K.K., Tokyo Editor-in-Chief of the Journal, "Sensors and Materials
2.	1998/04 ～ 2002/03	Synchrotron Radiation (SR) Center, Ritsumeikan Univ. Vice director of Synchrotron Radiation (SR) Center
3.	2000/12 ～ 2010/12	Research Institute for Micro System Technology, Ritsumeikan Univ. Director of Research Institute for Micro System Technology, Ritsumeikan University
4.	2002/10 ～ 2007/03	Japanese Ministry of Education, Culture, Sports, Science and Technology (MEXT-Japan) The Leader of 21st Century COE(Center of Excellence) Program, Japanese Ministry of Education, Culture, Sports, Science and Technology (MEXT-Japan)
5.	2007/05 ～ 2011	The Japan Institute of Electronics Packaging (JIEP) Executive of the Japan Institute of Electronics Packaging (JIEP)
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Research activities
1.		The Institute of Electrical Engineers of Japan
2.		The Japan Institute of Electronics Packaging (JIEP)
3.		The Japan Society of Applied Physics
4.		The Japan Society of Mechanical Engineers
5.		The Robotics Society of Japan
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Subject of research
1.	Study on Micro Electro Mechanical Systems
2.	Study on Micromachened Semiconductor Sensors
3.	Study on Microstructure Fabrication Using X-lay Lithography

Research summary
Micro and Nano Machine, Sensors, Integrated Electronic Machine System Study on realization and application of a micro/nanosystem capable of operating, measuring and processing on a precision level of a nanometer by integrating sensors, actuators and microprocessors on one chip

Present specialized field
Intelligent Mechanics and Machine System, Electron device/ Electronic equipment, Control Engineering (Keyword：Electronic Measurements and Control Engineering, Intelligent Mechanics, Electron Devices and Apparatus Engineering)

Books
1.	2011/12	Recent Advances in Nanofabrication Techniques and Applications, Ed. by Bo Cui, Chapter 16: Fabrication of 3-D Structures Utilizing Synchrotron Radiation Lithography │ ,pp.315-334
2.	2010/02	Nanowires, Chapter15: Electronic States and Piezoresistivity in Silicon Nanowires │ ,pp.297-314
3.	2009/04	MEMS/NEMS工学全集、桑野博喜監修、第3章 MEMS/NEMSプロセス基盤技術、第10節　厚膜プロセス、1．LIGA │ ,pp.490-497
4.	2009/01	Springer Proceedings in Physics, Vol.127: Physics and Engineering of New Materials, "Design and Fabrication of a Miniaturized Three-Degree-of-Freedom Piezoresistive Acceleration Sensor Based on MEMS T echnology Using Deep Reactive Ion Etching │ ,pp.377-383
5.	2003/05	ナノテクノロジーハンドブックⅠ編　創る（第１分冊）、ナノテクノロジーハンドブック編集委員会編、5章ナノ構造の製作技術、5・3 LIGAプロセス │ ,pp.197-203
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Papers
1.	2013/03	Fabrication of 3-D PTFE Microstructures Utilising Change of Etching Rate with Respect to Exposure Time │ Microsystem Technologies, Vol.19, Issue 3, Mar.2013, Springer-Verlag │ 19 (3),pp.351-356
2.	2013/03	Influence of Developer Temperature on the Shape of Structures Fabricated by Deep X-ray Lithography │ Microsystem Technologies, Vol.19, Issue 3, Mar.2013, Springer-Verlag │ 19 (3),pp.357-362
3.	2012/11	Basic Properties of an Ultrasonic Probe with a Through Hole for Puncture and Detection Principle of a Puncture Needle │ IEEJ Transactions on Sensors and Micromachines, Vol.132, No.11, The Inst. of Electrical Engineers of Japan │ 132 (11),pp.420-424
4.	2012/08	Highly-sensitive Fluorescence Detection and Imaging with Microfabricated Total Internal Reflection (TIR)-based Devices │ Journal of Micro-Nano Mechatronics, Springer-Verlag (2012) │ ,pp.45-59
5.	2012/03	Development of Polymer MEMS Process Technology as an Approach to a Sustainable Production System │ Advances in Natural Sciences: Nanoscience and Nanotechnology, Vol.3, No.1, Mar. 2012, IOP Publishing Ltd. │ 3 (1),pp.015009 (7pp)
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Academic conference presentation
1.	2014/10/30	Application of Polymer MEMS to Material Fatigue Testing
2.	2014/10/22	Road to Development of Piezoresistive Semiconductor Pressure Sensor
3.	2014/10/21	Electrostatic Resonator for Fatigue Test of Polymer Material
4.	2014/07/02	Fatigue Testing of PMMA Using Polymer MEMS Actuator Fabricated by Hot Embossing
5.	2013/11/14	Development of Environmental Friendly Polymer MEMS Process Technology and Its Application
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Winning science prize
1.	2012/08	Governor of Kyoto Prefecture Appreciation Award, from Mr. Keiji Yamada, Governor of Kyoto Prefecture, for contribution to the technical solution of the small and medium enterprises ((Contribution to the technical solution of the small and medium enterprises))
2.	2012/05	The Institute of Electrical Engineers of Japan The Honorable Achievement Award, from The Inst. of Electrical Engineers of Japan
3.	2011/05	The Institute of Electrical Engineers of Japan Awarded the Title of Fellow from The Inst. of Electrical Engineers of Japan
4.	2009/11	The Japan Society for Analytical Chenmistry The Excellent Poster Award in "Tokyo Conference 2009", from The Japan Society for Analytical Chenmistry
5.	2008/11	IEEE MHS MHS2008(IEEE) Best Paper Award
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Acquisition patent
1.		Sensor （米国出願番号09/046953）
2.		Ｘ線を用いた材料の加工方法及びその装置（特願2000－347103）
3.		Ｘ線マスク及びその製造方法（特願2000－344848）
4.		Ｘ線露光用レジスト基板及びその製造方法、該レジスト基板を用いた金型の製造方法並びに該金型を用いたマイクロ部品の製造方法（特開2000-206696）
5.		センサ（特願平9-90048）
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