AOYAGI Yoshinobu
Department / Course Research Organization of Science and Technology
Title / Position Visiting Senior Researcher
Language English
Publication Date 2001
Type Research paper
Title GaN ablation etching by simultaneous irradiation with F2 laser and KrF excimer laser
Contribution Type Joint Work
Journal J. Vac. Sci. Technol. B
Volume, Issue, Page 19,1388-1391
Author and coauthor T. Akane, K. Sugioka, K. Hammura, Y. Aoyagi, K. Midorikawa, K. Obata, K. Toyoda and S. Nomura