AOYAGI Yoshinobu
Department / Course Research Organization of Science and Technology
Title / Position Visiting Senior Researcher
Application No. WO2005JP11925
Date of Application 2005/06
Patent No. WO2006003921 (A1)
Patent Applicant RIKEN [JP]; OKINAKA MOTOKI; TSUKAGOSHI KAZUHITO; AOYAGI YOSHINOBU
Inventor OKINAKA MOTOKI; TSUKAGOSHI KAZUHITO; AOYAGI YOSHINOBU
Patent Title FINE PATTERN FORMING METHOD AND FINE PATTERN FORMING DEVICE