AOYAGI Yoshinobu
Department / Course Research Organization of Science and Technology
Title / Position Visiting Senior Researcher
Application No. H01J27/08
Date of Application 1987
Patent No. US4749912 (A)
Patent Applicant RIKAGAKU KENKYUSHO [JP]; TOKYO ELECTRON LTD [JP]
Inventor HARA TAMIO [JP]; HAMAGAKI MANABU [JP]; AOYAGI YOSHINOBU [JP]; NAMBA SUSUMU [JP]; ISHII NOBUO [JP]; TAKAYAMA NAOKI [JP]; KAWAMURA KOHEI [JP]
Patent Title Ion-producing apparatus