Department / Course College of Science and Engineering Department of Physical Sciences
Title / Position Professor
Language English
Publication Date 2018/06
Type Research paper (scientific journal)
Peer Review Yes
Title Chemical State Modification of 4H-SiC by Ultraviolet-Ray Aided Machining
Contribution Type Joint Work
Journal e-J. Surf. Sci. Nanotech.
Volume, Issue, Page 16,283-285
Author and coauthor Masaru Takizawa, Akihiro Hata, Kei Mitsuhara, and Takeshi Tanaka