ANDO Taeko
Department / Course College of Science and Engineering Department of Mechanical Engineering
Title / Position Professor
Language English
Publication Date 2016/02
Type Research paper (scientific journal)
Peer Review Yes
Title Effect of Temperature and Humidity on Degradation of Single-Crystal Silicon Microbeam in MEMS Resonator
Contribution Type Joint Work
Journal Sensors and Materials
Journal Type Another Country
Volume, Issue, Page 28(2),113-120
Total page number
Author and coauthor Taeko Ando, Mitsuhiro Shikida, and Kazuo Sato
DOI 10.18494/SAM.2016.1161
ISSN 0914-4935
URL for researchmap https://doi.org/10.18494/SAM.2016.1257