ANDO Taeko
Department / Course College of Science and Engineering Department of Mechanical Engineering
Title / Position Professor
Date 2019/11/20
Presentation Theme Evaluation of piezoresistive element for stress measurement of nanoscale silicon
Conference The 36th Sensor Sympojium on Sensors, Micromachines and Applied Systems
Promoters The Institute of Electrical Engineers of Japan (IEEJ) Sensors and Micromachines
Location Act City Hamamatsu
Conference Type Domestic
Presentation Type Poster
Contribution Type Collaborative
Publisher and common publisher Shugo Tanaka, Taeko Ando