Department / Course College of Science and Engineering Department of Mechanical Engineering
Title / Position Professor
Language English
Publication Date 1998
Type Research paper (scientific journal)
Peer Review Yes
Title Study on Fabrication of High Aspect Ratio MEMS Microparts using a Compact SR Beamline
Contribution Type Joint Work
Journal Microsystem Technologies
Journal Type Another Country
Volume, Issue, Page 4(2),61-63
Author and coauthor S. Sugiyama, Y. Zhang, M. Hosaka, H. Ueno, O.Tabata, R. Maeda