Department / Course College of Science and Engineering Department of Mechanical Engineering
Title / Position Professor
Date 2004/10
Presentation Theme Local machining with nm order precision by using FIB
Conference the 21th Sensor Symposium
Location kyoto
Contribution Type Collaborative
Publisher and common publisher S. Ogura, J. Makinodan, and S. Konishi, Y. Nakashima, and T. Yasuda