KONISHI Satoshi
Department / Course College of Science and Engineering Department of Mechanical Engineering
Title / Position Professor
Date 2003/01
Presentation Theme MEMS BASED ACOUSTIC FET AS ACTIVE COMPORNENTS FOR INTEGRATED FUNCTIONAL ACOUSTIC SYSTEMS
Conference The 16th IEEE International Conference on Micro Electro Mechanical Systems (MEMS’03)
Contribution Type Collaborative
Publisher and common publisher M. Terada, M. Tanaka and S. Konishi