KONISHI Satoshi
Department / Course College of Science and Engineering Department of Mechanical Engineering
Title / Position Professor
Date 2011/06/07
Presentation Theme TRANSFER TECHNOLOGY OF PYROLYZED POLYMER ONTO LOW THERMAL TOLERANCESUBSTRATE
Conference The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’11)
Location Chaina, Beijing
Conference Type International
Presentation Type Speech (General)
Contribution Type Collaborative
Publisher and common publisher T. Kobayashi, A. Akazawa, Y. Furuno, W. Tonomura and S. Konishi