TORIYAMA Toshiyuki
Department / Course College of Science and Engineering Department of Mechanical Engineering
Title / Position Professor
Language English
Publication Date 2010
Type Research paper
Peer Review Yes
Title Measurement of mechanical and thermal properties of co-sputtered WSi thin film for MEMS applications
Contribution Type Other
Journal Microsystem Technologies
Volume, Issue, Page 16,1881-1886
Author and coauthor B.T.Tung, D.V. Dao, T.Toriyama , S.Sugiyama