TORIYAMA Toshiyuki
Department / Course College of Science and Engineering Department of Mechanical Engineering
Title / Position Professor
Language English
Publication Date 2010
Type Research paper
Peer Review Yes
Title Analysis for piezoresistive property of heavily-doped polysilicon with upper and lower bounds
Contribution Type Joint Work
Journal Journal of Applied Physics
Volume, Issue, Page Vol.108,pp.064902-1-11
Author and coauthor N.Matsuzuka and T.Toriyama