TORIYAMA Toshiyuki
Department / Course College of Science and Engineering Department of Mechanical Engineering
Title / Position Professor
Language English
Publication Date 2004
Type Research paper
Title Piezoresistance consideration on n-type 6H SiC for MEMS based piezoresistance sensors
Contribution Type Single Work
Journal Journal of Micromechanics and Microengineering
Volume, Issue, Page Vol.14,1445-1448
Author and coauthor T.Toriyama