TORIYAMA Toshiyuki
Department / Course College of Science and Engineering Department of Mechanical Engineering
Title / Position Professor
Language English
Publication Date 2002
Type Research paper
Title Single Crystal Silicon Nano-Wire Piezoresistors for Mechanical Sensors
Contribution Type Joint Work
Journal Journal of Microelectromechanical Systems
Volume, Issue, Page Vol.11,pp.605-611
Author and coauthor T.Toriyama, Y.Tanimoto and S.Sugiyama