Researcher Database

KIMATA Masafumi

Department / Course Research Organization of Science and Technology VLSI Center

Title / Position Visiting Senior Researcher

Papers
1.	2011	Micro Mirror Aarrays for Improved Sensitivity of Thermopile Infrared Sensors │ Proceedings of IEEE MEMS │ ,pp.708-711 (Co-authored)
2.	2010/08	Comb-drive micro display-mirror packaged in a high vacuum metal can │ Journal of Micromechanics and Microengineering │ 19 (4),pp.927-935 (Co-authored)
3.	2010/03	Vacuum Packaging Technology for Uncooled Infrared Sensor │ IEEJ Transactions on Electrical and Electronic Engineering │ 5 (2),pp.175-180 (Co-authored)
4.	2009/07	Improved Infrared Position Sensitive Detector │ 電気学会論文誌E │ 129 (7),pp.215-220 (Co-authored)
5.	2009	Vacuum Packaging Technology for Mass Production of Uncooled IRFPAs │ Proceedings of SPIE │ 7298,pp.72982A-1-10 (Co-authored)
6.	2008	Indfrared Position Sensitive Detector (IRPSD) │ Proceedings of SPIE │ 6940,pp.694031-1–11 (Co-authored)
7.	2007	Chip Scale Vacuum Packaging for Uncooled IRFPA │ 電気学会論文誌A │ 127 (7),pp.405-410 (Co-authored)
8.	2007	Infrared Position Sensitive Detector (IRPSD) │ ,pp.69-74 (Co-authored)