Researcher Database

SUGIYAMA Susumu

Department / Course Research Organization of Science and Technology

Title / Position Visiting Senior Researcher

Books
1.	2011/12	Recent Advances in Nanofabrication Techniques and Applications, Ed. by Bo Cui, Chapter 16: Fabrication of 3-D Structures Utilizing Synchrotron Radiation Lithography │ ,pp.315-334 (Co-authored)
2.	2010/02	Nanowires, Chapter15: Electronic States and Piezoresistivity in Silicon Nanowires │ ,pp.297-314 (Co-authored)
3.	2009/04	MEMS/NEMS工学全集、桑野博喜監修、第3章 MEMS/NEMSプロセス基盤技術、第10節　厚膜プロセス、1．LIGA │ ,pp.490-497 (Sole-authored)
4.	2009/01	Springer Proceedings in Physics, Vol.127: Physics and Engineering of New Materials, "Design and Fabrication of a Miniaturized Three-Degree-of-Freedom Piezoresistive Acceleration Sensor Based on MEMS T echnology Using Deep Reactive Ion Etching │ ,pp.377-383 (Co-authored)
5.	2003/05	ナノテクノロジーハンドブックⅠ編　創る（第１分冊）、ナノテクノロジーハンドブック編集委員会編、5章ナノ構造の製作技術、5・3 LIGAプロセス │ ,pp.197-203 (Sole-authored)
6.	2003/03	LIGA", Data File of Process Technology, Basic, Chapter 9.2 │ ,pp.175-179 (Co-authored)
7.	2002/12	化学便覧応用化学編　第6版、日本化学会編、Ｖ編第5章センサ技術、5.2.4 力学センサ │ (Sole-authored)
8.	2001/02	電気工学ハンドブック、第6版10編第3章物理センサ │ (Sole-authored)
9.	1995/02	Handbook for Instrument and Control Technology │ (Co-authored)
10.	1992/06	Micromachining and Micromechatronics │ (Co-authored)
11.	1991/05	High-Resolution Silicon Pressure Imagery with CMOS Processing Circuits │ ,pp.170-173 (Co-authored)
12.	1991/05	Micro-Diaphragm Pressure Sensor │ ,pp.130-133 (Co-authored)