研究者学術情報データベース

スギヤマ　ススム
杉山　進
SUGIYAMA Susumu

所属総合科学技術研究機構

職名上席研究員

学会発表
1.	2014/10/30	Application of Polymer MEMS to Material Fatigue Testing ((ICAMN 2014) The 2nd Int'l Conf. on Advanced Materials and Nanotechnology, Hanoi, Vietnam, Oct.29-Nov.1, 2014)
2.	2014/10/22	ピエゾ抵抗式半導体圧力センサの開発の道のり (電気学会センサ・マイクロマシン部門大会、第31回「センサ・マイクロマシンと応用システム」シンポジウム、2014年10月20-22日、島根県松江市、くにびきメッセ、22am2-B1(6p))
3.	2014/10/21	静電容量型振動子を用いたPMMAの疲労試験 (電気学会センサ・マイクロマシン部門大会、第31回「センサ・マイクロマシンと応用システム」シンポジウム、2014年10月20-22日、島根県松江市、くにびきメッセ、21pm3-PS6(6p))
4.	2014/07/02	Fatigue Testing of PMMA Using Polymer MEMS Actuator Fabricated by Hot Embossing ((APCOT 2014) The 7th Asia-Pacific Conf. on Transducers and Micro/Nano Technologies, Jun.29-July 2, 2014, Daegu, Korea, Proc. 14-1(2p))
5.	2013/11/14	Development of Environmental Friendly Polymer MEMS Process Technology and Its Application ((IWNA 2013) The 4th Int'l Workshop on Nanotechnology and Application, Nov.14-16,2013, Vung Tau, Vietnam)
6.	2013/11/14	Monolithic Biochips Based on Evanescent Excitation for Highly-sensitive Fluorescent Detection ((IWNA 2013) The 4th Int'l Workshop on Nanotechnology and Application, Nov.14-16,2013, Vung Tau, Vietnam)
7.	2013/11/11	Development of Electrothermal Microactuator Using a Low Environmental Load Polymer ((IEEE MHS 2013) IEEE 2013 Int'l Symposium on Micro-NanoMechatronics and Human Science, Nov.10-13, 2013, Nagoya, Aichi, Japan)
8.	2013/11/06	MEMS技術を用いた超軽量宇宙X線光学系の開発 (第30回「センサ・マイクロマシンと応用システム」シンポジウム、仙台市、2013年11月5-7日、電気学会センサ・マイクロマシン部門)
9.	2013/11/05	低環境負荷ポリマー材料を用いた電熱型双安定マイクロアクチュエータの製作 (第30回「センサ・マイクロマシンと応用システム」シンポジウム、仙台市、2013年11月5-7日、電気学会センサ・マイクロマシン部門)
10.	2013/11/01	LIGAプロセスおよびポリマーMEMSの開発 (文部科学省先端研究基盤共用・ﾌﾟﾗｯﾄﾌｫｰﾑ形成事業：NewSUBARU/立命館SRｾﾝﾀｰ合同ｼﾝﾎﾟｼﾞｳﾑ2013、2013年11月1日、京都ﾘｻｰﾁﾊﾟｰｸ)
11.	2013/09/11	アゾベンゼン液晶を用いた有機光導波路の光スイッチング (第62回高分子討論会、2013年9月11-13日、金沢大学、高分子学会)
12.	2013/07/13	Micro Transmission Systems Based on Electrostatic Actuator ((SF-MINAS 2013) International Workshop opn Soft & Flexible Micro/Nano System Technology, Griffith Univ., Gold Coast Campus, Australia, July 12-14, 2013)
13.	2013/07/12	Development of Environmental Friendly Polymer MEMS Process Technology ((SF-MINAS 2013) International Workshop opn Soft & Flexible Micro/Nano System Technology, Griffith Univ., Gold Coast Campus, Australia, July 12-14, 2013)
14.	2013/07/04	Development of Polymer MEMS Process Technology and its Application (ナノ・マイクロ　ビジネス展／ロボテック　次世代ロボット製造技術展、2013年7月3-5日、東京ビッグサイト、(一財)マイクロマシンセンター主催、日独マイクロナノ・ビジネスフォーラム)
15.	2013/06/18	Development of MEMS Using Biodegradable Polymer Material ((Transducers 2013 & Eurosensors XXVII) The 17th Int'l Conf. on Solid-State Sensors, Actuators and Microsystems, Jun.16-20, 2013, Barcelona, Catalonia, Spain, IEEE)
16.	2012/12/14	Development of Environmental Friendly Polymer MEMS Fabrication Process Technology ((ICAMN 2012) 2012 Int'l Conf. on Advanced Materials and Nanotechnology, The 20th ITIMS Anniversary 1992-2012, Dec.13-14, 2012, Hanoi, Vietnam)
17.	2012/12/07	シンクロトロン放射光による三次元マイクロ・ナノ構造の形成 (LIGAプロセスと関連技術に関するワークショップ2012、兵庫県民会館（神戸市）、平成24年12月7日)
18.	2012/11/01	Cap-size Effect in Micromachined NH3 Gas Sensor Based on WO3 Nanoparticle Thin Film ((IWAMSN 2012) The 6th Int'l Workshop on Advanced Materials Science and Nanotechnology, Ha Long City, Vietnam, Oct. 30-Nov. 2, 2012)
19.	2012/11/01	Dynamic Characteristics of Polymer MEMS Devices Fabricated by Thermal Imprinting Process ((IWAMSN 2012) The 6th Int'l Workshop on Advanced Materials Science and Nanotechnology, Ha Long City, Vietnam, Oct. 30-Nov. 2, 2012)
20.	2012/10/23	Micro Blood Separation Polymer Device Utilizing Capillary Phenomenon for Uric Acid Measurement (The 29th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.22-24, 2012, Kitakyushu-City, Japan, The Inst. of Electrical Engineers of Japan)
21.	2012/10/15	Dynamic Characteristics of Polymer MEMS Devices Fabricated by Thermal Imprinting (SJTU-Ritsumeikan Univ. MEMS Symposium 2012, Oct.15-19, Shanghai, China, Shanghai Jiao Tong Univ. (Invited))
22.	2012/10/15	MEMS Based Heterointegration Technologies for Photonic Devices in Sensing and Data Communication (SJTU-Ritsumeikan Univ. MEMS Symposium 2012, Oct.15-19, Shanghai, China, Shanghai Jiao Tong Univ.)
23.	2012/09/11	Fabrication and Characterization of Polymer MEMS Using PMMA as a Material ((Micro-Tribology 2012) 6th International Colloquium Micro-Tribology 2012, Sept. 9-13, 2012, Osieck-Warsaw, Poland)
24.	2012/05/24	U型貫通孔を有する医療用超音波アレイ探触子の基礎研究 (第29回強誘電体応用会議（FMA29）、2012年5月23日-26日、コープイン京都（京都市）)
25.	2012/03/27	シンクロトロン放射光による三次元マイクロ・ナノ構造の形成 (「シンクロトロン光の利用研究の現状と産業利用」講演会、平成24年3月27日、あいち産業科学技術総合センター(愛知県豊田市)、公益財団法人科学技術交流財団（愛知県）主催)
26.	2012/01/26	ポリマーMEMSプロセスの開発とマイクロアクチュエーターへの応用 (平成23年度　第1回マイクロナノ応用フォーラム、平成24年1月26日、(財)北九州産業学術推進機構、北九州市)
27.	2012/01/26	医療用貫通型超音波探触子の基礎特性と針の検出原理 (電子情報通信学会研究会（US&EA）、2012年1月26-27日、吹田市、（社）電子情報通信学会、「信学技報」Vol.111, No.401, pp.19-24)
28.	2011/12/21	ものづくり産業力強化と支援戦略を考えてみよう (第14回次世代産業振興に関する調査事例報告会（NNI）、平成23年12月21日、名古屋市、名古屋市市民経済局産業部産業経済課)
29.	2011/12/16	MEMS技術の最新動向－グリーン化への試みを含め－ (第4回日本真空協会関西支部実用技術セミナー、2011年12月16日、大阪市)
30.	2011/11/10	Development of Sustainable and Environmental Friendly Polymer MEMS Production Process ((IWNA 2011) The 3rd Int'l Workshop on Nanotechnology and Application, Nov.10-12, 2011, Vung Tau, Vietnam (Invited))
31.	2011/11/10	Strain Sensing Effect in Silicon Photonic Crystal Nanocavities ((IWNA 2011) The 3rd Int'l Workshop on Nanotechnology and Application, Nov.10-12, 2011, Vung Tau, Vietnam (Invited))
32.	2011/09/27	熱インプリント法を用いたPMMA製静電容量型マイクロ加速度センサーの製作および特性評価 (第28回「センサ・マイクロマシンと応用システム」シンポジウム、平成23年9月26-27日、東京)
33.	2011/09/26	Displacement Sensing Based on Two-dimensional Photonic Crystal Nano-rod Defect Cavity (The 28th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Sept. 26-27, 2011, Tokyo, IEEJ Sensors and Micromachines Soc)
34.	2011/09/26	電気化学計測を行うマイクロ流路の最適な構造設計 (第28回「センサ・マイクロマシンと応用システム」シンポジウム、平成23年9月26-27日、東京)
35.	2011/09/09	表面活性化接合および微細嵌合構造を用いたポリマーMEMSの実装に関する研究 ((MES 2011) エレクトロニクス実装学会秋季大会第21回マイクロエレクトロニクスシンポジウム、2011年9月8-9日、関西大学、吹田市)
36.	2011/09/07	Longitudinal Strain Sensitive Effect in a Photonic Crystal Cavity ((Eurosensors 2011) The 25th Anniversary of Eurosensors, Sept.4-7, Athens, Greece)
37.	2011/09/07	Micromachined NH3 Gas Sensor with ppb-level Sensitivity Based on WO3 Nanoparticles Thinfilm ((Eurosensors 2011) The 25th Anniversary of Eurosensors, Sept.4-7, Athens, Greece)
38.	2011/05/26	医療用貫通リングアレイ型超音波プローブの基礎研究 (第28回強誘電体応用会議(FMA28)、平成23年5月25-28日、京都、講演予稿集26-P-15)
39.	2011/05/24	炭化ケイ素におけるひずみ応答の結晶多形依存性シミュレーション (第1回マルチスケールマテリアルモデリングシンポジウム、大阪大学コンベンションセンター（吹田市）)
40.	2011/02/09	Development of Wireless Smart Multisensor Devices for a Green World ((GDMS 2011) Int'l Workshop on Green Devices and Micro Systems, Feb.9, 2011, AIST Tsukuba, Japan)
41.	2011/02/09	Environment Friendly MEMS Process ((GDMS 2011) Int'l Workshop on Green Devices and Micro Systems, Feb.9, 2011, AIST Tsukuba, Japan)
42.	2011/02/09	Overview of G-device Project for Green Innovation at Center Kansai ((GDMS 2011) Int'l Workshop on Green Devices and Micro Systems, Feb.9, 2011, AIST Tsukuba, Japan)
43.	2011/01/26	Fabrication and Characterization of Silicon Micro Mirror with CNT Hinge ((IEEE MEMS 2011) The 24rd IEEE Int'l Conference on Micro Electro Mechanical Systems, Jan. 23-27, 2011, Cancun, Mexico)
44.	2011/01/25	Real-Time Monitoring of CA2+ Concentration in Pancreatic Beta Cells by a Microfluidic Device Integrated with Total Internal Reflection (TIR)-based Chip ((IEEE MEMS 2011) The 24rd IEEE Int'l Conference on Micro Electro Mechanical Systems, Jan. 23-27, 2011, Cancun, Mexico)
45.	2010/12/18	Blood Plasma Separation PMMA Device Using Capillary Phenomenon and Its Application for Point of Care Testing Device ((PACIFICHEM 2010) Int'l Chemical Congress of Pacific Basin Societies, Dec.15-20, 2010, Honolulu, Hawaii, Canadian Soc. for Chemistry)
46.	2010/12/16	First-Principles Simulation on Piezoresistivity of Macro/Nanoscale Silicon Materials ((PACIFICHEM 2010) Int'l Chemical Congress of Pacific Basin Societies, Dec.15-20, 2010, Honolulu, Hawaii, Canadian Soc. for Chemistry)
47.	2010/12/06	Basic Properties of Ring-Type Ultrasonic Probe for Biopsy (The 31st Symposium on UltraSonic Electronics (USE 2010), Dec.6-8, 2010, Tokyo)
48.	2010/11/12	Development of Polymer MEMS Process Technology as Approach to a Sustainable Production System ((IWAMSN 2010) The 5th Int'l Workshop on Advanced Materials Science and Nanotechnology, Hanoi, Vietnam, Nov.9-12, 2010)
49.	2010/11/11	First-Principles Simulation on Piezoresistivity in Alpha and Beta Silicon Carbide Nanosheets ((MNC 2010) The 23rd Int'l Microprocesses and Nanotechnology Conference, Nov.9-12, 2010, Fukuoka, Japan)
50.	2010/11/10	Towards Highly Sensitive Strain Sensing Based on Nanostructured Materials ((IWAMSN 2010) The 5th Int'l Workshop on Advanced Materials Science and Nanotechnology, Hanoi, Vietnam, Nov.9-12, 2010)
51.	2010/11/09	Study on Fabrication of Ni Mirror Chip for Space X-ray Telescopes Utilizing LIGA Process ((IEEE MHS 2010) 2010 Int'l Symposium on Micro-NanoMechatronics and Human Science & Micro-Nano Global COE, Nov.7-10, 2010)
52.	2010/11/09	Theoretical Investigation of Piezo-Optic Effect in Photonic Crystal Nanocavity for Nanostrain Detection ((IEEE MHS 2010) 2010 Int'l Symposium on Micro-NanoMechatronics and Human Science & Micro-Nano Global COE, Nov.7-10, 2010)
53.	2010/11/08	Design and Fabrication of Blood Plasma Separation PMMA Chip Using Capillary Phenomenon ((IEEE MHS 2010) 2010 Int'l Symposium on Micro-NanoMechatronics and Human Science & Micro-Nano Global COE, Nov.7-10, 2010)
54.	2010/11/04	Strain Sensitivity of a Modified Single-Defect Photonic Crystal Nanocavity for Mechanical Sensing ((IEEE Sensors 2010) The 9th IEEE Conference on Sensors, Nov.1-4, 2010)
55.	2010/11/03	Development of a Miniaturized No2 Gas Sensor Based on Nanoparticles WO3 Thin Film on Interdigitated Electrodes ((IEEE Sensors 2010) The 9th IEEE Conference on Sensors, Nov.1-4, 2010)
56.	2010/11/03	MEMS Accelerometers with Nanoscale Sensing Elements ((IEEE Sensors 2010) The 9th IEEE Conference on Sensors, Nov.1-4, 2010)
57.	2010/10/14	Development of an Efficient and Low Cost Fabrication Process for Polymer MEMS Devices Using Hot Embossing and Polishing Processes (第27回「センサ・マイクロマシンと応用システム」シンポジウム、平成22年10月14-15日、くにびきメッセ（島根）)
58.	2010/10/14	Fabrication of Small Ultrasonic Linear-Array Probes to Support Endoscopic Surgery (第27回「センサ・マイクロマシンと応用システム」シンポジウム、平成22年10月14-15日、くにびきメッセ（島根）)
59.	2010/10/14	Nanostrain Sensing Based on Piezo-optic Property of a Photonic Crystal Filter (The 27th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.14-15, 2010, Shimane, IEEJ Sensors and Micromachines Soc)
60.	2010/10/14	第一原理計算による炭化ケイ素のピエゾ抵抗物性解析 (第27回「センサ・マイクロマシンと応用システム」シンポジウム、平成22年10月14-15日、くにびきメッセ（島根）)
61.	2010/09/17	炭化ケイ素単結晶のピエゾ抵抗物性シミュレーション (第4回分子科学討論会、2010年9月14-17日、大阪大学豊中キャンパス（豊中市）)
62.	2010/09/14	バンド計算による低次元シリコン伝導帯の電子運動量に関する考察 (2010年（平成22年）秋季第71回応用物理学会学術講演会、2010年9月14-17日、長崎大学(長崎市))
63.	2010/09/10	Properties of Sputtered Tungsten Silicide Thinfilm Measured by Using MEMS Structures ((MES 2010) The 20th Micro Electronics Symposium 2010)
64.	2010/09/10	「血漿分離、スクリーニング、センサ検出」を集積したオンサイト型血液診断装置の開発 ((MES 2010) ｴﾚｸﾄﾛﾆｸｽ実装学会秋季大会第20回ﾏｲｸﾛｴﾚｸﾄﾛﾆｸｽｼﾝﾎﾟｼﾞｳﾑ)
65.	2010/09/10	ホットエンボスおよび研磨加工による可動構造を持つポリマーMEMSデバイスの低コスト製作プロセスの研究 ((MES 2010) ｴﾚｸﾄﾛﾆｸｽ実装学会秋季大会第20回ﾏｲｸﾛｴﾚｸﾄﾛﾆｸｽｼﾝﾎﾟｼﾞｳﾑ)
66.	2010/09	将来衛星に向けた超軽量、高分解能MEMS光学系の基礎開発(3) (2010年（平成22年）秋季第71回応用物理学会学術講演会、2010年9月14-17日、長崎大学（長崎市）)
67.	2010/08/12	Investigation of Strain Sensitivity of Photonic Crystal Nanocavity for Mechanical Sensing (Optical MEMS and Nanophotonics 2010, Sapporo, Japan, Aug. 9-12, 2010, Proceedings)
68.	2010/08/12	MEMS-based X-ray Optics for Future Astronomical Missions (Optical MEMS and Nanophotonics 2010, Sapporo, Japan, Aug. 9-12, 2010, Proceedings)
69.	2010/08/09	Polymer-MEMS Torsion Mirror with Large Rotation Angle and Low Driving Voltage (Optical MEMS and Nanophotonics 2010, Sapporo, Japan, Aug. 9-12, 2010, Proceedings)
70.	2010/08/09	X-ray Imaging Test for a Single-stage MEMS X-ray Optical System (Optical MEMS and Nanophotonics 2010, Sapporo, Japan, Aug. 9-12, 2010, Proceedings)
71.	2010/07/08	MEMS Process of CNTs Thin Film and Its Application ((APCOT 2010) The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, 6-9 July, Perth, Western Australia)
72.	2010/07/08	Multi-axis MEMS Accelerometer with Nanoscale Sensing Elements and Surrounding Mass Structure ((APCOT 2010) The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, 6-9 July, Perth, Western Australia)
73.	2010/07/07	A Robust Fabrication Method of Polymer MEMS Devices Based on Hot Embossing and Mechanical Machining ((APCOT 2010) The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, 6-9 July, Perth, Western Australia)
74.	2010/07/07	A Three Sensing Points Tactile Finger Tip ((APCOT 2010) The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology, 6-9 July, Perth, Western Australia)
75.	2010/06/24	医療応用のための貫通孔を有する超音波円形プローブ (電子情報通信学会　超音波研究会(US)、東京、2010年6月24日)
76.	2010/05/24	摂動論によるシリコンのスピン－軌道相互作用解析 (第13回理論化学討論会、札幌市、5月23-25日)
77.	2010/05/21	バンド計算における低次元閉じ込め効果の検証と物性への影響 (第15回分子動力学シンポジウム、札幌市、2010年5月21日)
78.	2010/03/28	毛細管力を用いた血漿分離マイクロ流路の設計とそのオンサイト型血液分析デバイス開発への応用 (日本化学会第90春季年会、東大阪市、近畿大学、2010年3月26-29日)
79.	2010/03/18	単結晶シリコンの二次元化による電子状態とピエゾ抵抗物性の影響 (第57回応用物理学関係連合講演会、平成22年春季、3月17-20日、東海大学)
80.	2010/03/09	超軽量・高角度分解能 MEMS X線光学系の開発 (高エネルギー宇宙物理連絡会　第10回研究会、2010年3月8-10日、JAXA宇宙科学研究本部・相模原キャンパス)
81.	2010/01/27	Evaluation of Piezoresistance Coefficients of Silicon Nanosheets on the Basis of First-Principles Band Structures ((IEEE MEMS 2010) The 23rd IEEE Int'l Conference on Micro Electro Mechanical Systems, 24-28 Jan. 2010, Hong Kong, China)
82.	2010/01/21	ＭＥＭＳの集積・融合の進展と新産業創出への期待 ((ICP 2010) 第11回半導体パッケージング技術展　専門技術セミナー、2010年1月20-22日、東京ビッグサイト、ICP-3)
83.	2010/01/08	超軽量・高角度分解能新MEMS X線光学系の開発 (第10回宇宙科学シンポジウム、平成22年1月7-8日、宇宙航空研究開発機構宇宙科学研究本部、相模原市)
84.	2009/11/19	医療応用のための貫通孔を有する超音波円形プローブ ((USE 2009) 第30回超音波エレクトロニクスの基礎と応用に関するシンポジウム、2009年11月18-20日、同志社大学、京都)
85.	2009/11/18	First-Principles Simulation on Thickness Dependence of Piezoresistance Effect in Silicon Nanosheets ((MNC 2009) The 22nd Int'l Microprocesses and Nanotechnology Conference, 16-19 Nov. 2009)
86.	2009/11/12	Development of Highly Integrated and Complex MEMS: "Fine MEMS" Technology ((IWNA 2009) The 2nd Int'l Workshop on Nanotechnology and Application, Nov.12-14, 2009, Vung Tau, Vietnam)
87.	2009/11/12	Micro/Nano Mechanical Sensors and Actuator Based on Silicon MEMS Technology ((IWNA 2009) The 2nd Int'l Workshop on Nanotechnology and Application, Nov.12-14, 2009, Vung Tau, Vietnam)
88.	2009/11/11	Study on an Efficient Fabrication Process for PMMA Movable Microstructures Based on Hot Embossing and Polishing Processes ((IEEE MHS 2009) IEEE 2009 Int'l Symposium on Micro-NanoMechatronics and Human Science, Nov.8-11, 2009, Nagoya, Aichi, Japan)
89.	2009/11/11	Study on Optimization of Exposure Energy Distribution for Fabrication of Arbitrary 3-D Microstructure by Shaped Beam Using Synchrotron Radiation ((IEEE MHS 2009) IEEE 2009 Int'l Symposium on Micro-NanoMechatronics and Human Science, Nov.8-11, 2009, Nagoya, Aichi, Japan)
90.	2009/11/10	Characterization of the Piezoresistive Effect and Temperature Coefficient of Resistance in Single Crystalline Silicon Nanowires ((IEEE MHS 2009) IEEE 2009 Int'l Symposium on Micro-NanoMechatronics and Human Science, Nov.8-11, 2009, Nagoya, Aichi, Japan)
91.	2009/11/10	Ultra Miniature μ-Accelerometer for Wearable Physical Activity Monitoring Systems ((IEEE MHS 2009) IEEE 2009 Int'l Symposium on Micro-NanoMechatronics and Human Science, Nov.8-11, 2009, Nagoya, Aichi, Japan)
92.	2009/11/09	Piezoresistive Effect in Silicon Nanowires - A Comprehensive Analysis Based on First-Principles Calculations ((IEEE MHS 2009) IEEE 2009 Int'l Symposium on Micro-NanoMechatronics and Human Science, Nov.8-11, 2009, Nagoya, Aichi, Japan)
93.	2009/11/04	Dual-color Total Internal Reflection (TIR)-based Devices with Uniform and High S/N Ratio overlapped Evanescent Fields ((MicroTAS 2009) The Proceedings of 13th Int'l Conference on Miniaturized Systems for Chemistry and Life Sciences, Jeju, Korea, Nov. 1-5, 2009)
94.	2009/10/27	All PDMS Multi-color Total Internal Reflectin (TIR)-based Devices for Multi-fluorescence Detection and Imaging ((IEEE Sensors 2009) The 8th IEEE Conference on Sensors, Christchurch, New Zealand, Oct.25-28, 2009)
95.	2009/10/27	PMMA High Sensitive Capacitive Micro Accelerometer Fabricated Based on Hot Embossing ((IEEE Sensors 2009) The 8th IEEE Conference on Sensors, Christchurch, New Zealand, Oct.25-28, 2009)
96.	2009/10/27	Ultra Miniature Novel Three-Axis Micro Accelerometer ((IEEE Sensors 2009) The 8th IEEE Conference on Sensors, Christchurch, New Zealand, Oct.25-28, 2009)
97.	2009/10/26	Evaluation of the Piezoresistive Effect in Single Crystalline Silicon Nanowires ((IEEE Sensors 2009) The 8th IEEE Conference on Sensors, Christchurch, New Zealand, Oct.25-28, 2009)
98.	2009/10/26	Microfluidic Valveless Pump Actuated by Electromagnetic Force ((IEEE Sensors 2009) The 8th IEEE Conference on Sensors, Christchurch, New Zealand, Oct.25-28, 2009)
99.	2009/10/26	Piezoresistive and Thermoelectric Effects of CNT Thin Film Patterned by EB Lithography ((IEEE Sensors 2009) The 8th IEEE Conference on Sensors, Christchurch, New Zealand, Oct.25-28, 2009)
100.	2009/10/19	Development of Highly Integrated and Complex MEMS: "Fine MEMS" Technology (The 3rd SJTU-Ritsumeikan University Micro/Nano Science and Technology Symposium 2009, Oct. 19, 2009, Shanghai, China)
101.	2009/10/19	Dimensional Reduction Effect on Electronic States and Piezoresistivity in Nanoscale Silicon Materials (The 3rd SJTU-Ritsumeikan University Micro/Nano Science and Technology Symposium 2009, Oct. 19, 2009, Shanghai, China)
102.	2009/10/16	DEP and EP Effects on AC-EOF in a DNA Concentrator (The 26th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.15-16, 2009, Tokyo, Japan, The Sensors and Micromachines Society, IEEJ)
103.	2009/10/16	Development of Novel Three-Axis Solid-state Micro Accelerometer with Surrounding Beam Structure (The 26th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.15-16, 2009, Tokyo, Japan, The Sensors and Micromachines Society, IEEJ)
104.	2009/10/16	Fabrication of PMMA Capacitive Microaccelerometer Based on Hot Embossing (The 26th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.15-16, 2009, Tokyo, Japan, The Sensors and Micromachines Society, IEEJ)
105.	2009/10/15	Dual-color Total Internal Reflection (TIR)-Based Devices with Smooth PDMS Lens for High S/N Ratio Overlapped Evanescent Fields (The 26th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.15-16, 2009, Tokyo, Japan, The Sensors and Micromachines Society, IEEJ)
106.	2009/10/15	Electronic States and Piezoresistivity in Silicon Nanosheets (The 26th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.15-16, 2009, Tokyo, Japan, The Sensors and Micromachines Society, IEEJ)
107.	2009/10/15	Evaluation of Properties of Sputtered Tungsten Silicide Thinfilm for MEMS Applications (The 26th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.15-16, 2009, Tokyo, Japan, The Sensors and Micromachines Society, IEEJ)
108.	2009/10/15	Fabrication of Tactile System with Three Sensing Points Using Micro Force/Moment Sensor (The 26th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.15-16, 2009, Tokyo, Japan, The Sensors and Micromachines Society, IEEJ)
109.	2009/09/22	シリコンのピエゾ抵抗効果におけるスピン－軌道相互作用の影響 (第3回分子科学討論会、2009年9月21-24日、名古屋、分子科学会)
110.	2009/09/08	p型バルクシリコンのピエゾ抵抗係数シミュレーション (第70回応用物理学会学術講演会、平成21年秋季、2009年9月8-11日、富山大学)
111.	2009/09/04	POCTに向けた微量血液の血漿分離技術の開発 (東京コンファレンス2009、2009年9月2-4日、千葉市＜ポスター賞受賞＞)
112.	2009/07/24	シンクロトロン放射光の整形ビームによるPMMAの三次元加工法の提案 (電気学会ｾﾝｻ･ﾏｲｸﾛﾏｼﾝ部門総合研究会、ﾏｲｸﾛﾏｼﾝ･ｾﾝｻｼｽﾃﾑ研究会、2009年7月23-24日、東京、(社)電気学会)
113.	2009/07/15	Study on Geometry of Valveless-Micropump ((IEEE/ASME AIM 2009) 2009 IEEE/ASME Int'l Conference on Advanced Intelligent Mechatronics, Singapore, July 14-17, 2009)
114.	2009/06/28	Fabrication of 3-D Microstructures by Shaped Beam Using Mask-less SR Lithography ((HARMST 2009) The 8th Int'l Workshop on High Aspect Ratio Micro Structure Technology, Saskatoon, Canada, June 25-28, 2009)
115.	2009/06/28	Ultra Light-weight and High-resolution X-ray Mirrors Using DRIE and X-ray LIGA Techniques for Space X-ray Telescopes ((HARMST 2009) The 8th Int'l Workshop on High Aspect Ratio Micro Structure Technology, Saskatoon, Canada, June 25-28, 2009)
116.	2009/06/24	A Cross-Junction Channel Valveless-Micropump with Integrated Hotwires for Fluidic Application ((Transducers '09) The 15th Int'l Conference on Solid-State Sensors, Actuators & Microsystems, Jun.21-25, 2009, Denver, Colorado, USA)
117.	2009/06/24	Design and Fabrication of Convective Inertial Sensor Consisting of 3DOF Gyroscope and 2DOF Accelorometer ((Transducers '09) The 15th Int'l Conference on Solid-State Sensors, Actuators & Microsystems, Jun.21-25, 2009, Denver, Colorado, USA)
118.	2009/06/23	Sensitivity Enhancement of Piezoresistive Micro Acceleration Sensors with Nanometer Stress Concentration Regions on Sensing Elements ((Transducers '09) The 15th Int'l Conference on Solid-State Sensors, Actuators & Microsystems, Jun.21-25, 2009, Denver, Colorado, USA)
119.	2009/06/22	Tangential and Perpendicular Driving Micro Transmission Systems Based on Ratchet Mechanism and Electrostatic Actuator ((Transducers '09) The 15th Int'l Conference on Solid-State Sensors, Actuators & Microsystems, Jun.21-25, 2009, Denver, Colorado, USA)
120.	2009/06/09	ＭＥＭＳファンドリーの現状と動向 (Electronic Journal 第352回 Technical Seminar、2009年6月9日、東京)
121.	2009/05/22	ドープ半導体のピエゾ抵抗物性理論とシミュレーション (第14回分子動力学シンポジウム、日本材料学会、平成21年5月22日、愛媛)
122.	2009/05/14	Analysis of Sliding of a Soft Fingertip Embedded with a Novel Micro Force/Moment Sensor: Simulation, Experiment, and Application ((IEEE ICRA 2009) 2009 IEEE Int'l Conference on Robotics and Automation, Kobe, Japan, May 12-17, 2009)
123.	2009/01/29	Monolithic Multicolor Total Internal Reflection(TIR)-based Chip for Highly-sensitive Multifluorescence Detection and Imaging ((IEEE MEMS2009) The 22nd IEEE Int'l Conference on Micro Electro Mechanical Systems, 25-29 Jan. 2009, Sorrento, Italy)
124.	2009/01/26	Development of a Monolithic PMMA Comb-drive Micro Actuator Utilizing Hot Embossing and Ultra-precision Machining ((IEEE MEMS2009) The 22nd IEEE Int'l Conference on Micro Electro Mechanical Systems, 25-29 Jan. 2009, Sorrento, Italy)
125.	2008/12/19	Development and Application of Total Internal Reflection (TIR)-based Chip based on MEMS Technology ((ISMST 2008) 2008 Int'l Symposium on Micro/Nano System Technology, Dec.18-21, 2008, Hanoi, Vietnam)
126.	2008/12/18	First-principles Simulation on Piezoresistive Properties in Low-dimensional Silicon Materials ((ISMST 2008) 2008 Int'l Symposium on Micro/Nano System Technology, Dec.18-21, 2008, Hanoi, Vietnam)
127.	2008/12/18	Improvements in the Design of the Multi-axis Piezoresistive Accelerometer ((ISMST 2008) 2008 Int'l Symposium on Micro/Nano System Technology, Dec.18-21, 2008, Hanoi, Vietnam)
128.	2008/12/18	Polymer MEMS based on Hot Embossing Technology ((ISMST 2008) 2008 Int'l Symposium on Micro/Nano System Technology, Dec.18-21, 2008, Hanoi, Vietnam)
129.	2008/12/18	Silicon Mechanical Sensors and Actuators based on MEMS Technology and Applications ((ISMST 2008) 2008 Int'l Symposium on Micro/Nano System Technology, Dec.18-21, 2008, Hanoi, Vietnam)
130.	2008/11/06	Design and Simulation of Convective Inertial Sensor ((IEEE MHS 2008) IEEE 2008 Int'l Symposium on Micro-NanoMechatronics and Human Science, Nagoya, Aichi, Japan)
131.	2008/11/06	Design and Simulation of Piezoresistive Micro Accelerometers for Wearable Sensing Applications ((IEEE MHS 2008) IEEE 2008 Int'l Symposium on Micro-NanoMechatronics and Human Science, Nagoya, Aichi, Japan)
132.	2008/11/06	Fabrication of a PMMA Torsional Micromirror Device based on Hot Embossing Process ((IEEE MHS 2008) IEEE 2008 Int'l Symposium on Micro-NanoMechatronics and Human Science, Nagoya, Aichi, Japan)
133.	2008/11/06	Highly-sensitive Dual-fluorescence Detection and Imaging with Integrated Dual-color Total Internal Reflection (TIR)-based Chip ((IEEE MHS 2008) IEEE 2008 Int'l Symposium on Micro-NanoMechatronics and Human Science, Nagoya, Aichi, Japan)
134.	2008/11/06	Micro Ratcheting Transmission Systems Based on Electrostatic Actuator ((IEEE MHS 2008) IEEE 2008 Int'l Symposium on Micro-NanoMechatronics and Human Science, Nagoya, Aichi, Japan)
135.	2008/10/28	A Dual-color Total Internal Reflection (TIR)-based Chip for Simultaneous Detection of Two Fluorophores ((IEEE Sensors 2008) The 7th Annual IEEE Conference on Sensors, Oct.26-29, 2008, Lecce, Italy)
136.	2008/10/28	A Multi Axis Fluidic Inertial Sensor ((IEEE Sensors 2008) The 7th Annual IEEE Conference on Sensors, Oct.26-29, 2008, Lecce, Italy)
137.	2008/10/23	Developing a Wearable System with MEMS Accelerometer for Real-Time Activity Monitoring (The 25th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.22-24, 2008, Okinawa, Japan, The Inst. of Electrical Engineers of Japan)
138.	2008/10/23	Electronic States in Silicon Nanowires and Prospects of Their Piezoresistivity (The 25th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.22-24, 2008, Okinawa, Japan, The Inst. of Electrical Engineers of Japan)
139.	2008/10/23	Fabrication of Polymer Electrostatic Mirror Device Using Hot Embossing and Ultra-Precision Cutting Technology (The 25th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.22-24, 2008, Okinawa, Japan, The Inst. of Electrical Engineers of Japan)
140.	2008/10/23	Fabrication of X-ray Total Reflection Mirror Chip Using by Synchrotron Radiation Lithography (The 25th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.22-24, 2008, Okinawa, Japan, The Inst. of Electrical Engineers of Japan)
141.	2008/10/23	Research of Mask-less 3D Fabrication Method by Shaped Beam Using SR Light (The 25th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.22-24, 2008, Okinawa, Japan, The Inst. of Electrical Engineers of Japan)
142.	2008/10/22	Design, Analysis and Fabrication of a Dual-color Total Internal Reflection (TIR)-based Chip for Simultaneous Detection of Two Fluorescent Materials (The 25th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.22-24, 2008, Okinawa, Japan, The Inst. of Electrical Engineers of Japan)
143.	2008/10/22	Driving Micro Containers in Straight and Turning Paths by Using Electrostatic Actuators and Ratchet Mechanism (The 25th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.22-24, 2008, Okinawa, Japan, The Inst. of Electrical Engineers of Japan)
144.	2008/10/22	Fabrication and Characteristic Evaluation of Silicon Micro Jet Pump (The 25th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.22-24, 2008, Okinawa, Japan, The Inst. of Electrical Engineers of Japan)
145.	2008/10/22	Study on Integration of Micro Force Moment Sensor into Joystick Device (The 25th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.22-24, 2008, Okinawa, Japan, The Inst. of Electrical Engineers of Japan)
146.	2008/10/15	A Valve-less Micro Pump with PZT Diaphragm ((μTAS2008) The 12th Int'l Conf. on Miniaturized Systems for Chemistry and Life Sciences, Oct. 12-16, 2008, San Diego, Calif., USA)
147.	2008/10/15	Integration of Evanescent Excitation (EE)-based Chip with Microfluidic Channels for Upright and Inverted Microscope Observations ((μTAS2008) The 12th Int'l Conf. on Miniaturized Systems for Chemistry and Life Sciences, Oct. 12-16, 2008, San Diego, Calif., USA)
148.	2008/08/06	ラチェット機構を有するマイクロコンテナを用いたマイクロトランスポーテーションシステム (（社）日本機械学会2008年度年次大会、2008年8月3日-7日、横浜国立大学、横浜市)
149.	2008/07/29	Highly Integrated and Complex MEMS: "Fine MEMS" Project (The 14th Int'l Micromachine/Nanotech Symposium, July 29, 2008)
150.	2008/06/25	Design and Simulation of a Micro Jet Pump ((APCOT2008) The 4th Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008, 22-25 June, 2008, Taiwan)
151.	2008/06/25	Development of an Ultra Small Semiconducting metal Oxide No2 Gas Sensor with Integrated Micro Heater ((APCOT2008) The 4th Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008, 22-25 June, 2008, Taiwan)
152.	2008/06/23	A Micro Rotational Motor based on Ratchet Mechanism and Electrostatic Comb-drive Actuators ((APCOT2008) The 4th Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008, 22-25 June, 2008, Taiwan)
153.	2008/06/23	Development of Polymer Electrostatic Comb-drive Actuator by Using Hot Embossing and Ultra-Precision Cutting Technology ((APCOT2008) The 4th Asia-Pacific Conference on Transducers and Micro-Nano Technology 2008, 22-25 June, 2008, Taiwan)
154.	2008/05/21	Measurement Near-wall Velocity Fields of Fluorescent Nanoparticles Transported in Microchannel Utilizing Integrated Evanescent Excitation (EE)-based Chip (The 17th CHEMINAS, May 20-21, Kyushu Univ., Fukuoka City)
155.	2008/01/14	A Fully Functional Micro Transportation System with Strider-like Movement of Micro Containers ((IEEE MEMS 2008) The 21st IEEE Int'l Conference on Micro Electro Mechanical Systems, Jan.13-17, 2008)
156.	2008/01/13	シンクロトロン放射光を用いた超微細構造の形成と応用 (第21回日本放射光学会年会・放射光科学合同シンポジウム、2008年1月12-14日)
157.	2008/01/09	Optimum Design Considerations for a 3-DOF Micro Accelerometer Using Nanoscale Piezoresistors ((IEEE-NEMS) The 3rd IEEE Int. Conf. on Nano/Micro Engineered and Molecular Systems, Jan.6-9, 2008)
158.	2007/12/06	The New Exposure Method for Acquiring Freer 3-D Structure by Using Synchrotron Radiation ((IDW'07) The 14th Int'l Display Workshops, Dec. 5-7, 2007)
159.	2007/12/05	Design and Fabrication Process of a Micropump Using Bulk Pb(Zr,Ti)O3 for Microfluidic Devices (SPIE Microelectronics, MEMS, and Nanotechnology, Dec.4-7, 2007)
160.	2007/11/15	MEMS based on Integration of Functional Micro-nano Structures ((IWNA 2007) 1st Int'l Workshop on Nanotechnology and Application, Nov. 15-17, 2007)
161.	2007/11/15	Three Degree of Freedom Micro Accelerometer Depend on MEMS Technology: Fabrication and Application ((IWNA 2007) 1st Int'l Workshop on Nanotechnology and Application, Nov. 15-17, 2007)
162.	2007/11/12	Advanced Simulation for Shape-prediction of 3-D PTFE Microstructures Fabricated by Using Synchrotron Radiation ((IEEE MHS2007 & Micro-Nano COE) IEEE 2007 Int'l Symposium on Micro-NanoMechatronics and Human Science & Symposium on "Micro-NanoMechatronics for an Information-Based Society", The 21st Century COE Program, Nagoya Univ., Nov.11-14, 2007)
163.	2007/11/12	Antireflection Micro Patterning Using EB-Lithography ((IEEE MHS2007 & Micro-Nano COE) IEEE 2007 Int'l Symposium on Micro-NanoMechatronics and Human Science & Symposium on "Micro-NanoMechatronics for an Information-Based Society", The 21st Century COE Program, Nagoya Univ., Nov.11-14, 2007)
164.	2007/11/12	Development of an Electrostatic Micro Transportation System (MTS) with Strider-like Movement of Micro Carts ((IEEE MHS2007 & Micro-Nano COE) IEEE 2007 Int'l Symposium on Micro-NanoMechatronics and Human Science & Symposium on "Micro-NanoMechatronics for an Information-Based Society", The 21st Century COE Program, Nagoya Univ., Nov.11-14, 2007)
165.	2007/11/12	Passive Operating On-chip Plasma Isolation from Whole Blood ((IEEE MHS2007 & Micro-Nano COE) IEEE 2007 Int'l Symposium on Micro-NanoMechatronics and Human Science & Symposium on "Micro-NanoMechatronics for an Information-Based Society", The 21st Century COE Program, Nagoya Univ., Nov.11-14, 2007)
166.	2007/11/12	Variable Proximity Multiple Exposures in SR Lithography for Fabrication of 3D Micro/nanostructures ((IEEE MHS2007 & Micro-Nano COE) IEEE 2007 Int'l Symposium on Micro-NanoMechatronics and Human Science & Symposium on "Micro-NanoMechatronics for an Information-Based Society", The 21st Century COE Program, Nagoya Univ., Nov.11-14, 2007)
167.	2007/11/02	3D Microfabrication of Plastics Using Synchrotron Radiation ((AOFSRR) 2nd Asia-Oceania Forum for Synchrotron Radiation Research)
168.	2007/11/02	3D Microfabrication of Plastics Using Synchrotron Radiation ((AOFSRR) 2nd Asia-Oceania Forum for Synchrotron Radiation Research)
169.	2007/11/02	Proximity Effect on Fabrication of Diffraction Optical Elements in Synchrotron Radiation Lithography ((AOFSRR) 2nd Asia-Oceania Forum for Synchrotron Radiation Research)
170.	2007/10/30	Design and Fabrication of a Convective 3-DOF Angular Rate Sensor ((IEEE Sensors 2007) The 6th IEEE Conference on Sensors, Oct. 28-31, 2007)
171.	2007/10/29	Application of an Integrated Microfluidic Total Internal Reflection (TIR)-based Chip to Nano-Particle Image Velocimetry (nano-PIV) ((IEEE Sensors 2007) The 6th IEEE Conference on Sensors, Oct. 28-31, 2007)
172.	2007/10/29	Batteryless-Wireless MEMS Sensor System with a 3D Loop Antenna ((IEEE Sensors 2007) The 6th IEEE Conference on Sensors, Oct. 28-31, 2007)
173.	2007/10/17	Convective Accelerometer with P-N Junction Sensing Element (The 24th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 16-17, 2007)
174.	2007/10/17	Design and Fabrication of a Novel Electrostatic Lift Actuator (The 24th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 16-17, 2007)
175.	2007/10/17	Design and Simulation of a Novel 3-DOF MEMS Convective Gyroscope (The 24th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 16-17, 2007)
176.	2007/10/17	Micro Transportation Systems Based on Ratchet Mechanism and Electrostatic Comb-Drive Actuators (The 24th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 16-17, 2007)
177.	2007/10/17	SNA-MEMS-Batteryless-Wireless Sensing Module Utilizing RFID System (The 24th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 16-17, 2007)
178.	2007/10/16	Blood Separattion Device Using Capillary Phenomenon (The 24th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 16-17, 2007)
179.	2007/10/16	Development of a 3-DOF Micro Accelerometer with Wireless Readout (The 24th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 16-17, 2007)
180.	2007/10/16	Development of a Flexible Thermopile Power Generator Utilizing BiTe-Cu Thin Film (The 24th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 16-17, 2007)
181.	2007/10/16	Piezoelectric-Actuated Deformable Mirror for Adaptive Optics (The 24th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 16-17, 2007)
182.	2007/10/08	A Monolithic Evanescent Excitation (EE)-Based Biochip for Highly-Sensitive and Realtime Fluorescent Detection ((μTAS 2007) 11th Int'l Conference on Miniaturized Systems for Chemistry and Life Sciences, Paris, France, 7-11 Oct. 2007)
183.	2007/06/14	Convective Gas Gyroscope Based on Thermo-resistive Effect in Si P-N Junction ((Transducers '07 & Eurosensors XXI) The 14th Int'l Conference on Solid-state Sensors, Actuators and Microsystems, Jun.10-14, 2007)
184.	2007/06/13	A Total Internal Reflection (TIR)-based Chip for Ultra-Sensitive Fluorescent Sensing ((Transducers '07 & Eurosensors XXI) The 14th Int'l Conference on Solid-state Sensors, Actuators and Microsystems, Jun.10-14, 2007)
185.	2007/06/13	Blood Plasma Separation Device Using Capillary Phenomenon ((Transducers '07 & Eurosensors XXI) The 14th Int'l Conference on Solid-state Sensors, Actuators and Microsystems, Jun.10-14, 2007)
186.	2007/06/12	A Fully Integrated MEMS-based Convective 3-DOF Gyroscope ((Transducers '07 & Eurosensors XXI) The 14th Int'l Conference on Solid-state Sensors, Actuators and Microsystems, Jun.10-14, 2007)
187.	2007/06/12	Novel Micro Transportation Systems Based on Ratchet Mechanism and Electrostatic Actuators ((Transducers '07 & Eurosensors XXI) The 14th Int'l Conference on Solid-state Sensors, Actuators and Microsystems, Jun.10-14, 2007)
188.	2007/06/07	3D PTFE Microstructure Fabricated Using Synchrotron Radiation Etching ((HARMST 2007) The 7th Int'l Workshop on High-Aspect-Ratio Micro-Structure Technology, Jun.7-9, 2007)
189.	2007/06/07	Evaluation of Variable Proximity in SR Lithography for 3D Micro/Nanostructures ((HARMST 2007) The 7th Int'l Workshop on High-Aspect-Ratio Micro-Structure Technology, Jun.7-9, 2007, Besancon, France)
190.	2007/06/07	Limits of Deep Hole Microfabrication in SR Lithography ((HARMST 2007) The 7th Int'l Workshop on High-Aspect-Ratio Micro-Structure Technology, Jun.7-9, 2007)
191.	2007/06/07	The Research about the Electroformed Micro Springs by LIGA Process ((HARMST 2007) The 7th Int'l Workshop on High-Aspect-Ratio Micro-Structure Technology, Jun.7-9, 2007)
192.	2007/01/18	Development of Bio-chemical Sensor System Integrated with Blood Extraction Device ((IEEE-NEMS) Proceedings of the 2nd IEEE Int'l Conference on Nano/Micro Engineered and Molecular Systems, Jan.16-19, 2007, pp.847-850)
193.	2006/12/12	Microfabrication of PLLA Polymer by X-ray Lithography ((SPIE) Smart Materials, Nano- and Micro-Smart Systems, 10-13 Dec., 2006, (Proc. of SPIE, Vol.6415, 64150H))
194.	2006/12/07	3-Dimensional Microfabrication of Polytetrafluoroethylene by Using Synchrotron Radiation ((IDW '06) Proceedings of the 13th International Display Workshops, Dec.7, 2006, Otsu (Late-News Paper MEMS2-7L) Vol.2)
195.	2006/12/07	Performance of Flexible SR-exposure Stages for Mutiple Purposes in Micro/Nanofabrication ((IDW '06) Proceedings of the 13th International Display Workshops, Dec.7, 2006, Otsu, (Late-News Paper MEMS3-5L) Vol.2)
196.	2006/11/17	「新産業創出のキーとなるMEMSテクノロジー」－MEMSの集積・融合化技術の進展－ (経営講演会、(材)りそな中小企業振興財団、りそな銀行東京本社講堂、東京、平成18年11月17日)
197.	2006/11/08	Characterization of mRNA Detection Device in Liquid Phase ((μTAS 2006) The 10th International Conference on Miniaturized Systems for Chemistry and Life Sciences, Nov. 5-9, 2006)
198.	2006/11/08	Fabrication and Characterization of 4-DOF Soft-contact Tactile Sensor and Application to Robot Fingers ((IEEE MHS 2006) Proceedings of IEEE MHS 2006 (2006 Int'l Symposium on Micro-Nano Mechatronics and Human Science), Nov.6-8, 2006)
199.	2006/11/06	Design and Simulation of an Intergrated Metal Oxide Based Micro NO2 Gas Sensor ((IEEE MHS 2006) Proceedings of IEEE MHS 2006 (2006 Int'l Symposium on Micro-Nano Mechatronics and Human Science), Nov.6-8, 2006)
200.	2006/11/06	Design, Simulation and Fabrication of a Monolithic Total Internal Reflection (TIR) Chip for Fluorescent-based Bio Detection ((IEEE MHS 2006) Proceedings of IEEE MHS 2006 (2006 Int'l Symposium on Micro-Nano Mechatronics and Human Science), Nov.6-8, 2006)
201.	2006/11/06	Study on Fabrication of Polymer Eletrostatic Comb-drive Actuator by DXRL Technique ((IEEE MHS 2006) Proceedings of IEEE MHS 2006 (2006 Int'l Symposium on Micro-Nano Mechatronics and Human Science), Nov.6-8, 2006)
202.	2006/11/06	X-ray Lithography Fabrication of Poly-L-Lactides Microstructures ((IEEE MHS 2006) Proceedings of IEEE MHS 2006 (2006 Int'l Symposium on Micro-Nano Mechatronics and Human Science), Nov.6-8, 2006)
203.	2006/10/25	Development of 4-DOF Soft-Contact Tactile Sensor and Application to Gripping Operation of Robotics Fingers ((IEEE Sensors 2006) Proceedings of the 5th IEEE Conference on Sensors, Oct.22-25, 2006 (C3L-C3))
204.	2006/10/25	Development of a Dual Axis Convective Gyroscope with Embedded Heater and Low Thermal-stress Thermistors ((IEEE Sensors 2006) Proceedings of the 5th IEEE Conference on Sensors, Oct.22-25, 2006 (C3L-E5))
205.	2006/10/25	Fabrication and Characterization of a 2-DOF Micro Convective Accelerometer ((IEEE Sensors 2006) The 5th IEEE Conference on Sensors, Oct.22-25, 2006)
206.	2006/10/24	Tactile Perception Using Micro/Force/Moment Sensor Embedded in Soft Finger Tip ((IEEE Sensors 2006) The 5th IEEE Conference on Sensors, Oct.22-25, 2006)
207.	2006/10/20	Batteryless Accelerometer Using Power Feeding System of RFID ((SICE-ICCAS 2006) Proceeding of SICE-ICASE International Joint Conference 2006, Oct.18-21)
208.	2006/10/06	Fabrication and Characterization of 3-DOF Soft-Contact Tactile Sensor Utilizing Micro Force Moment Sensor (Proceedings of the 23rd Sensor Symposium on Sensors, Micromachine and Applied Systems, Oct.5-6, 2006)
209.	2006/10/06	Optimization of PZT Diaphragm Pump to Enhance Circular Flow and Application to Convective Gyroscope (23rd Sensor Symposium on Sensors, Micromachine and Applied Systems, Oct.5-6, 2006, Takamatsu, Kagawa, Japan)
210.	2006/10/05	Fabrication and Characterization of Smooth Si Mold for Hot Embossing Process (23rd Sensor Symposium on Sensors, Micromachine and Applied Systems, Oct.5-6, 2006, Takamatsu, Kagawa, Japan)
211.	2006/10/05	Fabrication of an Ultra Small 3 Axis Accelerometer That Has Outside Stress Reduction Structure Utilizing Si Nanoscale Piezoresistors (23rd Sensor Symposium on Sensors, Micromachine and Applied Systems, Oct.5-6, 2006, Takamatsu, Kagawa, Japan)
212.	2006/10/05	Fabrication of Micropump Using Bulk PZT (23rd Sensor Symposium on Sensors, Micromachine and Applied Systems, Oct.5-6, 2006, Takamatsu, Kagawa, Japan)
213.	2006/10/05	Varifocal Mirror Using Low-driving-voltage Piezoelectric Actuators (23rd Sensor Symposium on Sensors, Micromachine and Applied Systems, Oct.5-6, 2006, Takamatsu, Kagawa, Japan)
214.	2006/08/30	MEMS・集積化の進展と新産業創出への期待 (2006年（平成18年）秋季　第67回応用物理学会学術講演会付随、第39回応用物理学会スクール（2006年秋季）、滋賀、立命館大学、2006年8月30日)
215.	2006/08/29	アルミ薄膜構造体を用いた静電駆動型マイクロミラーデバイスの製作 (2006年（平成18年）秋季　第67回応用物理学会学術講演会、滋賀、立命館大学、2006年8月29-9月1日)
216.	2006/07/12	Development of a Soft Fingertip Sensor Utilizing MEMS-based Multi-axis Force Sensor ((ISFA2006) Proceedings of 2006 Int'l Symposium on Flexible Automation, Osaka, Japan, July 10-12, 2006, ISCIE/ASME-DSC)
217.	2006/07/12	Sensitivity Improved Miniaturized Piezoresistive Accelerometer for Biomechanical Applications ((ISFA2006) Proceedings of 2006 Int'l Symposium on Flexible Automation, Osaka, Japan, July 10-12, 2006, ISCIE/ASME-DSC)
218.	2006/07/12	Theoretical and Experimental Study on Micro Fluidic Actuator Utilizing Surface Acoustic Wave ((ISFA2006) Proceedings of 2006 Int'l Symposium on Flexible Automation, Osaka, Japan, July 10-12, 2006, ISCIE/ASME-DSC)
219.	2006/07/11	A Gas Accelerometer with Low Thermal Stress Thermistor ((ISFA2006) Proceedings of 2006 Int'l Symposium on Flexible Automation, Osaka, Japan, July 10-12, 2006, ISCIE/ASME-DSC)
220.	2006/07/11	A Si Micro Conveyer System with Straight Displacement based on Reciprocating Motions of Ratchet Mechanism and Electrostatic Comb-drive Actuators ((ISFA2006) Proceedings of 2006 Int'l Symposium on Flexible Automation, Osaka, Japan, July 10-12, 2006, ISCIE/ASME-DSC)
221.	2006/07/10	MEMSの集積・融合の進展と新産業創出への期待 (第7回MEMS講習会「MEMSの設計・加工技術と応用例」（中・上級者向け）、(財)マイクロマシンセンターファンドリーサービス産業委員会、アルカディア市ヶ谷（東京・私学会館）、2006年7月10日)
222.	2006/07/08	MEMS (Micro Electro Mechanical Systems) の研究開発動向と新産業創出への期待 (平成18年度総合講座Ⅰ、名城大学理工学部、名城大学天白ｷｬﾝﾊﾟｽ、名古屋市、平成18年7月8日)
223.	2006/06/28	A Novel Micro Conveyer System based on Ratchet Mechanism and Electrostatic Comb-drive Actuators ((APCOT2006) Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore, Jun. 25-28, 2006, IEEE)
224.	2006/06/27	Development of 4-DOF Soft Fingertip Sensor Utilizing Micro Force Moment Sensing Chip ((APCOT2006) Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore, Jun. 25-28, 2006, IEEE)
225.	2006/06/26	Fabrication of Alumina X-Ray Lithography Mask for Sub-Micron Structure Basing on Anodizing Method ((APCOT2006) Asia-Pacific Conference of Transducers and Micro-Nano Technology, Singapore, Jun. 25-28, 2006, IEEE)
226.	2006/05/26	圧電アクチュエータを用いた焦点可変ミラー (（FMA-23）第23回強誘電体応用会議、京都、2006年5月24～27日、強誘電体応用会議主催、電気学会他協賛)
227.	2006/05/16	液相トランスクリプトーム解析デバイスの開発 (（13th CHEMINAS）第13回化学とマイクロ・ナノシステム研究会、講演要旨集、2006年5月16日～17日、東京大学生産技術研究所、化学とマイクロ・ナノシステム研究会主催、電気学会E部門共催)
228.	2006/03	Plane-pattern to Cross-section Transfer (PCT) Using Deep X-ray Lithography for Fabrication of 3-D Micro/Nanostructures ((ISMNT-2) Proceedings of The 2nd Int''l Symposiym on Micro & Nano Technology, Mar.29-31, 2006, Hsinchu, Taiwan)
229.	2006/01	A Dual Axis Gas Gyroscope Based on Convective and Thermo-Resistive Effects in Silicon with Low Thermal-Induced Stress Sensing Element ((MEMS2006) Technical Digest, 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, 22-26 Jan. 2006)
230.	2006/01	Flexible Thin-Film BiTe Thermopile for Room Temperature Power Generation ((MEMS2006) Technical Digest, 19th IEEE International Conference on Micro Electro Mechanical Systems, Istanbul, Turkey, 22-26 Jan. 2006)
231.	2006/01	新産業創出のキーとなるMEMSテクノロジー (MMCファンドリーサービス産業委員会　第6回MEMS講習会、京都、（財）ﾏｲｸﾛﾏｼﾝｾﾝﾀｰﾌｧﾝﾄﾞﾘｰｻｰﾋﾞｽ産業委員会)
232.	2005/12/08	New Progress of Integration and Fusion in MEMS ((IDW/AD'05) Proceedings, The 12th Int'l Display Workshops in Conjunction with Asia Display 2005, Dec.6-9, 2005, Takamatsu, Japan, ITE(The Inst. of Image Information and Television Engineers)/SID(The Soc. For Information Display))
233.	2005/12	Advanced Simulation for Shape-Prediction of Microstructures Fabricated by PCT Technique ((SPIE) SPIE Int''l Symposium, Microelectronics, MEMS, and Nanotechnology, 11-15 Dec. 2005, Brisbane, Australia, The Int''l Soc. for Optical Engrg.)
234.	2005/12	Development of Fabrication Process for Shape Control of Three-Dimensional Submicron Structure by Synchrotron Radiaton Lithography ((SPIE) SPIE Int''l Symposium, Microelectronics, MEMS, and Nanotechnology, 11-15 Dec. 2005, Brisbane, Australia, The Int''l Soc. for Optical Engrg.)
235.	2005/12	Development of Micromotion Sensors Based on Piezoresistive and Thermo-Resistive Effects in Silicon ((SPIE) SPIE Int''l Symposium, Microelectronics, MEMS, and Nanotechnology, 11-15 Dec. 2005, Brisbane, Australia, The Int''l Soc. for Optical Engrg.)
236.	2005/12	Fabrication of Submicron Three-Dimensional Structure by Plane-Pattern to the Cross-Section Transfer Method Using Synchrotron Radiation Lithography ((SPIE) SPIE Int''l Symposium, Microelectronics, MEMS, and Nanotechnology, 11-15 Dec. 2005, Brisbane, Australia, The Int''l Soc. for Optical Engrg.)
237.	2005/12	Flexible Bi2Te2.5Se0.5 and Bi0.5Sb1.5Te3 Thermopile Generator ((SPIE) SPIE Int''l Symposium, Microelectronics, MEMS, and Nanotechnology, 11-15 Dec. 2005, Brisbane, Australia, The Int''l Soc. for Optical Engrg.)
238.	2005/12	Novel Pressure-Gradient Driven Component for Blood Extraction ((SPIE) SPIE Int''l Symposium, Microelectronics, MEMS, and Nanotechnology, 11-15 Dec. 2005, Brisbane, Australia, The Int''l Soc. for Optical Engrg.)
239.	2005/12	Portable Blood Extraction Device Integrated with Biomedical Monitoring System ((SPIE) SPIE Int''l Symposium, Microelectronics, MEMS, and Nanotechnology, 11-15 Dec. 2005, Brisbane, Australia, The Int''l Soc. for Optical Engrg.)
240.	2005/11	A Si Micro Conveyer System Based on Electrostatic Comb-Drive Actuators ((MHS 2005/Micro-Nano COE) IEEE Proceedings of the 2005 Int''l Symposium on Micro-NanoMechatronics and Human Science/The 8th Symposium "Micro- and Nano-Mechatronics for Information-based Society", The 21st Century COE Program, Nagoya Univ., Nagoya, Nov.7-9, 2005)
241.	2005/11	Optimizatin and Characterizations of the Dual Axis Gas Gyroscope ((MHS 2005/Micro-Nano COE) IEEE Proceedings of the 2005 Int'l Symposium on Micro-NanoMechatronics and Human Science/The 8th Symposium "Micro- and Nano-Mechatronics for Information-based Society", The 21st Century COE Program, Nagoya Univ., Nagoya, Nov.7-9, 2005)
242.	2005/10/28	New Progress of Integration and Fusion in MEMS ((NANO 2005) Proceedings, Nanoengineering Symposium 2005, Oct. 26-28, 2005, Daejoen, Korea, Korean Soc. of Precision)
243.	2005/10	A Useful Study for Development of 3-D Microfabrication Method by SR Lithography (Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.20-21, 2005, Tokyo, IEEJ Sensors and Micromachines Society)
244.	2005/10	Application of Collective Synchronization to Sensor Data Processing (Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.20-21, 2005, Tokyo, IEEJ Sensors and Micromachines Society)
245.	2005/10	Design and Fabrication of Polymer Electrostatic Comb-Drive Actuators and Application in Micro Conveyer Systems (Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.20-21, 2005, Tokyo, IEEJ Sensors and Micromachines Society)
246.	2005/10	Design of Micro Force-Moment Sensors and Application to Soft Fingertip Sensor (Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.20-21, 2005, Tokyo, IEEJ Sensors and Micromachines Society)
247.	2005/10	Dual Axis Accelorometer Utilizing Low Doped Silicon Thermistor (Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.20-21, 2005, Tokyo, IEEJ Sensors and Micromachines Society)
248.	2005/10	Fabrication of an Ultra Small Accelerometer Utilizing Si Nanowire Piezoresistors (Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.20-21, 2005, Tokyo, IEEJ Sensors and Micromachines Society)
249.	2005/10	Fabrication of Diaphragm Actuator Using Bulk PZT (Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.20-21, 2005, Tokyo, IEEJ Sensors and Micromachines Society)
250.	2005/10	Fabrication of Self-Organization Alumina X-ray Lithography Mask for Sub-wavelength Nanometer Grating (Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.20-21, 2005, Tokyo, IEEJ Sensors and Micromachines Society)
251.	2005/10	Fabrication of Submicron 3D-Structure by Plane-patern to the Cross-section Transfer (PCT) Technique Using Synchrotron Radiation Lithography (Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.20-21, 2005, Tokyo, IEEJ Sensors and Micromachines Society)
252.	2005/10	Geometrical Optimization of LIGA Microneedles for Blood Extraction (Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.20-21, 2005, Tokyo, IEEJ Sensors and Micromachines Society)
253.	2005/10	Mirror Deformation by Piezoelectric Actuators (Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.20-21, 2005, Tokyo, IEEJ Sensors and Micromachines Society)
254.	2005/10	Transcriptome Analyzing Chip Based on Liquid-Phase Detection Using Fluorescence Labeled Nucleic Acid Probe (Proceedings of The 22nd Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct.20-21, 2005, Tokyo, IEEJ Sensors and Micromachines Society)
255.	2005/08	Fabrication and Test of Square Prism Shaped Dye Micro Laser Based on Photoresist Molding Process ((IEEE/LEOS 2005) International Conference on Optical MEMS and Their Applications, Aug. 1-4, 2005, Oulu, Finland, Lasers & Electro-Optics Society)
256.	2005/07	新産業創出のキーとなるMEMSテクノロジー (MMCファンドリーサービス産業委員会　第5回MEMS講習会、東京、（財）ﾏｲｸﾛﾏｼﾝｾﾝﾀｰﾌｧﾝﾄﾞﾘｰｻｰﾋﾞｽ産業委員会)
257.	2005/06/13	Geometrically Strengthening and Tip-Sharpening of Microneedle Array Fabricated by X-Ray Lithography ((HARMST 2005) Book of Abstracts, High Aspect Ratio Micro Structure Technology Workshop, Gyeongju, Korea, June 10-13, 2005)
258.	2005/06/12	Compensation of Mask Design for Sloped Side-Wall Structures Fabricated by X-Ray Lithography ((HARMST 2005) Book of Abstracts, High Aspect Ratio Micro Structure Technology Workshop, Gyeongju, Korea, June 10-13, 2005)
259.	2005/06/12	Fabrication of Micro-Parts Made of TiC/Ti5Si3 Nano-Grained Composite Using LIGA Product by Pseudo-Superplastic Deformation ((HARMST 2005) Book of Abstracts, High Aspect Ratio Micro Structure Technology Workshop, Gyeongju, Korea, June 10-13, 2005)
260.	2005/06/11	Fabrication of High Aspect Ratio Nano Gratings by SR Lithography ((HARMST 2005) Book of Abstracts, High Aspect Ratio Micro Structure Technology Workshop, Gyeongju, Korea, June 10-13, 2005)
261.	2005/06/11	Fabrication of Large Area Diffraction Grating on Cylindrical Surface by Copper Mesh as X-ray Lithography Mask ((HARMST 2005) Book of Abstracts, High Aspect Ratio Micro Structure Technology Workshop, Gyeongju, Korea, June 10-13, 2005)
262.	2005/06/11	Fabrication of Large Area Micro Grating by Copper Mesh as X-ray Lithography Mask ((HARMST 2005) Book of Abstracts, High Aspect Ratio Micro Structure Technology Workshop, Gyeongju, Korea, June 10-13, 2005)
263.	2005/02	A Dual Axis Gas Gyroscope Utilizing Low-Doped Silicon Thermistor (IEEE (MEMS 2005) Technical Digest, The 18th IEEE Int''l Conference on Micro Electro Mechanical Systems, Miami Beach, Florida, USA, Jan.30-Feb.3, 2005, IEEE and the Robotics and Automation Soc.)
264.	2005/02	Design and Fabricaton of Miniaturized Six-Degree of Freedom Piezoresistive Accelerometer (IEEE (MEMS 2005) Technical Digest, The 18th IEEE Int''l Conference on Micro Electro Mechanical Systems, Miami Beach, Florida, USA, Jan.30-Feb.3, 2005, IEEE and the Robotics and Automation Soc.)
265.	2005/02	Mechanical Characteristics of FIB Deposited Carbon Nanowire by Electrostatic Actuated Nano Tensile Testing Devices (EANAT) (IEEE (MEMS 2005) Technical Digest, The 18th IEEE Int''l Conference on Micro Electro Mechanical Systems, Miami Beach, Florida, USA, Jan.30-Feb.3, 2005, IEEE and the Robotics and Automation Soc.)
266.	2005/01	MEMSの集積・融合の進展と新産業創出への期待 (日本真空協会関西支部総会講演、大阪、日本真空協会関西支部)
267.	2005/01	新産業創出のキーとなるMEMSテクノロジー (MMCファンドリーサービス産業委員会　第4回MEMS講習会「MEMSの設計・加工技術と応用例」、京都、（財）ﾏｲｸﾛﾏｼﾝｾﾝﾀｰﾌｧﾝﾄﾞﾘｰｻｰﾋﾞｽ産業委員会)
268.	2004/12	Fabrication and Simulation of Novel Crown-shaped Microneedle Array (SPIE Int''l Symposium on Smart Materials, Nano-, and Micro-Smart Systems 2004, Dec. 12-15, 2004, Univ. of New South Wales, Sydney, Australia)
269.	2004/12	MEMS技術の開発動向と将来展望 (計測展2004 OSAKA、フォーラム講演、大阪、（社）日本電気計測器工業会)
270.	2004/12	Method for Accurately Shape-prediction of 3D Structure Fabricated by X-ray Lithography (SPIE Int''l Symposium on Smart Materials, Nano-, and Micro-Smart Systems 2004, Dec. 12-15, 2004, Univ. of New South Wales, Sydney, Australia)
271.	2004/12	立命館におけるMEMS研究 (MEMS技術分科会　第5回MEMS技術分科会、京都、大阪産業技術総合研究所センシング技術応用研究会MEMS技術分科会)
272.	2004/11/11	New Progress of Integration and Fusion in MEMS -Expectation for New Industry Creation- (Proceedings, The 10th International Micromachine/Nanotech Symposium, Tokyo, Nov. 11, 2004, (Special Lecture), Micromachine Center)
273.	2004/11	A Dual Axis Thermal Convective Silicon Gyroscope ((IEEE MHS2004/Micro-Nano COE) Proceedings of the 2004 Int'l Symposium on Micro-NanoMechatronics and Human Science/The 4th Symposium "Micro-NanoMechatronics for an Information-Based Society" The 21st Century COE Program, Nagoya Univ., Nagoya, Oct.31-Nov. 3, 2004)
274.	2004/11	A Dual Axis Thermal Convective Silicon Gyroscope ((IEEE MHS2004/Micro-Nano COE) Proceedings of the 2004 Int''l Symposium on Micro-NanoMechatronics and Human Science/The 4th Symposium "Micro-NanoMechatronics for an Information-Based Society" The 21st Century COE Program, Nagoya Univ., Nagoya, Oct.31-Nov. 3, 2004)
275.	2004/11	A New Design of a 6-DOF MEMS-based Sensor for Measuring Hydrodynamic Loads Acting on a Hemisphere ((ICMT2004) Proceedings of the 8th International Conference on Mechatronics Technology, Nov. 8-12, Hanoi, Vietnam, Inst. of Mechanics-Vietnamese Academy of Sci. & Technology, Vietnam National Univ. Publisher)
276.	2004/11	A New Design of a 6-DOF MEMS-based Sensor for Measuring Hydrodynamic Loads Acting on a Hemisphere ((ICMT2004) Proceedings of the 8th International Conference on Mechatronics Technology, Nov. 8-12, Hanoi, Vietnam, Inst. of Mechanics-Vietnamese Academy of Sci. & Technology, Vietnam National Univ. Publisher)
277.	2004/11	Characteristics of Ni Electroformed Micro Connector Used for High Density Packaging ((IEEE MHS2004/Micro-Nano COE) Proceedings of the 2004 Int'l Symposium on Micro-NanoMechatronics and Human Science/The 4th Symposium "Micro-NanoMechatronics for an Information-Based Society"The 21st Century COE Program, Nagoya Univ., Nagoya, Oct.31-Nov. 3, 2004)
278.	2004/11	Characteristics of Ni Electroformed Micro Connector Used for High Density Packaging ((IEEE MHS2004/Micro-Nano COE) Proceedings of the 2004 Int''l Symposium on Micro-NanoMechatronics and Human Science/The 4th Symposium "Micro-NanoMechatronics for an Information-Based Society" The 21st Century COE Program, Nagoya Univ., Nagoya, Oct.31-Nov. 3, 2004)
279.	2004/11	Design and Fabrication of Micro Combustion Rig for Micro Reciprocating Engine ((PowerMEMS 2004) Technical Digest, The 4th Int''l Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Nov. 28-30, 2004, Kyoto, Japan, Research Inst. for Micro System Technology, Ritsumeikan Univ., co-sponsored by IEEJ Sensors and Micromachines Soc., et al.)
280.	2004/11	Design and Simulation of an Ultra Small 3-DOF Accelerometer Utilizing Piezoresistive Effect in Si Nanowire ((ICMT2004) Proceedings of the 8th International Conference on Mechatronics Technology, Nov. 8-12, Hanoi, Vietnam, Inst. of Mechanics-Vietnamese Academy of Sci. & Technology, Vietnam National Univ. Publisher)
281.	2004/11	Design and Simulation of an Ultra Small 3-DOF Accelerometer Utilizing Piezoresistive Effect in Si Nanowire ((ICMT2004) Proceedings of the 8th International Conference on Mechatronics Technology, Nov. 8-12, Hanoi, Vietnam, Inst. of Mechanics-Vietnamese Academy of Sci. & Technology, Vietnam National Univ. Publisher)
282.	2004/11	Development of a 3-DOF Silicon Piezoresistive Micro Accelerometer ((IEEE MHS2004/Micro-Nano COE) Proceedings of the 2004 Int'l Symposium on Micro-NanoMechatronics and Human Science/The 4th Symposium "Micro-NanoMechatronics for an Information-Based Society" The 21st Century COE Program, Nagoya Univ., Nagoya, Oct.31-Nov. 3, 2004)
283.	2004/11	Development of a 3-DOF Silicon Piezoresistive Micro Accelerometer ((IEEE MHS2004/Micro-Nano COE) Proceedings of the 2004 Int''l Symposium on Micro-NanoMechatronics and Human Science/The 4th Symposium "Micro-NanoMechatronics for an Information-Based Society" The 21st Century COE Program, Nagoya Univ., Nagoya, Oct.31-Nov. 3, 2004)
284.	2004/11	Development of a 3-DOF Silicon Piezoresistive Micro Accelerometer Based on MEMS Technology ((ICMT2004) Proceedings of the 8th International Conference on Mechatronics Technology, Nov. 8-12, Hanoi, Vietnam, Inst. of Mechanics-Vietnamese Academy of Sci. & Technology, Vietnam National Univ. Publisher)
285.	2004/11	Development of a 3-DOF Silicon Piezoresistive Micro Accelerometer Based on MEMS Technology ((ICMT2004) Proceedings of the 8th International Conference on Mechatronics Technology, Nov. 8-12, Hanoi, Vietnam, Inst. of Mechanics-Vietnamese Academy of Sci. & Technology, Vietnam National Univ. Publisher)
286.	2004/11	Fabrication of Flexible Thermopile Generator Sheet ((PowerMEMS 2004) Technical Digest, The 4th Int''l Workshop on Micro and Nanotechnology for Power Generation and Energy Conversion Applications, Nov. 28-30, 2005, Kyoto, Japan, Research Inst. for Micro System Technology, Ritsumeikan Univ., co-sponsored by IEEJ Sensors and Micromachines Soc., et al.)
287.	2004/11	MEMS Technology as a Key of New Industry Creation ((ICMT2004) Proceedings of the 8th International Conference on Mechatronics Technology, Nov. 8-12, Hanoi, Vietnam, Inst. of Mechanics-Vietnamese Academy of Sci. & Technology, Vietnam National Univ. Publisher)
288.	2004/11	MEMS Technology as a Key of New Industry Creation ((ICMT2004) Proceedings of the 8th International Conference on Mechatronics Technology, Nov. 8-12, Hanoi, Vietnam, Inst. of Mechanics-Vietnamese Academy of Sci. & Technology, Vietnam National Univ. Publisher)
289.	2004/11	Microneedle Array Fabricated by Synchrotron Radiation Lithography for Multiple Uses of Bio-Medical Applications (平成16年度つくば新技術講座、つくば市、TCIつくば研究支援センター)
290.	2004/11	New Progress of Integration and Fusion in MEMS -Expectation for New Industry Creation- (Proceedings, The 10th International Micromachine/Nanotech Symposium, Tokyo, Nov. 11, 2004, (Special Lecture), Micromachine Center)
291.	2004/11	Study on a Dual Axis Thermal Convective Gas Gyroscope Utilizing Low-Doped Si Micro Thermistor ((ICMT2004) Proceedings of the 8th International Conference on Mechatronics Technology, Nov. 8-12, Hanoi, Vietnam, Inst. of Mechanics-Vietnamese Academy of Sci. & Technology, Vietnam National Univ. Publisher)
292.	2004/11	Study on a Dual Axis Thermal Convective Gas Gyroscope Utilizing Low-Doped Si Micro Thermistor ((ICMT2004) Proceedings of the 8th International Conference on Mechatronics Technology, Nov. 8-12, Hanoi, Vietnam, Inst. of Mechanics-Vietnamese Academy of Sci. & Technology, Vietnam National Univ. Publisher)
293.	2004/11	Two New Types of Microneedle Array Fabricated by X-ray Lithography (SPIE Photonics Asia 2004/(APOC2004)Asia-Pacific Optical Communications, Nov.8-12, Beijing, China [CD: 5641-35:S7])
294.	2004/11	X-ray Lithography Fabrication of Large Diffractive Optical Elements on a Curve Surface ((IEEE MHS2004/Micro-Nano COE) Proceedings of the 2004 Int'l Symposium on Micro-NanoMechatronics and Human Science/The 4th Symposium "Micro-NanoMechatronics for an Information-Based Society" The 21st Century COE Program, Nagoya Univ., Nagoya, Oct.31-Nov. 3, 2004)
295.	2004/11	X-ray Lithography Fabrication of Large Diffractive Optical Elements on a Curve Surface ((IEEE MHS2004/Micro-Nano COE) Proceedings of the 2004 Int''l Symposium on Micro-NanoMechatronics and Human Science/The 4th Symposium "Micro-NanoMechatronics for an Information-Based Society" The 21st Century COE Program, Nagoya Univ., Nagoya, Oct.31-Nov. 3, 2004)
296.	2004/11	X-ray Lithography Mask Fabricated by Excimer Laser Process (SPIE Photonics Asia 2004/(APOC2004)Asia-Pacific Optical Communications, Nov.8-12, Beijing, China [CD: 5641-58:S3])
297.	2004/11	集団同期のネットワークセンシングへの応用 (電子情報通信学会技術研究報告、NLP2004-67～75［非線形問題］Vol.104、No.471)
298.	2004/11	放射光リソグラフィーによる三次元マイクロ・ナノ構造の製作 (平成16年度つくば新技術講座、つくば市、TCIつくば研究支援センター)
299.	2004/11	放射光リソグラフィーによる三次元マイクロ・ナノ構造の製作 (平成16年度つくば新技術講座、つくば市、TCIつくば研究支援センター)
300.	2004/10	A Dual Axis Silicon Gyroscope Based on Thermal Convective Effect ((IEEE Sensors2004) The 3rd Int''l Conference on Sensors, Oct.24-27, 2004, Vienna Univ. of Technology, Vienna, Austria, IEEE Sensors Council)
301.	2004/10	A Silicon Micromachined Six-Degree of Freedom Piezoresistive Accelerometer ((IEEE Sensors2004) The 3rd Int''l Conference on Sensors, Oct.24-27, 2004, Vienna Univ. of Technology, Vienna, Austria, IEEE Sensors Council)
302.	2004/10	Alignment X-ray Lithography for Hole Perforating Through PCT-Microneedle (Proceedings of the 21th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 14-15, 2004, Kyoto, The Institute of Electrical Engineers of Japan)
303.	2004/10	Design & Fabrication of Miniaturized Piezoresistive Six-Degree of Freedom　Accelerometer (Proceedings of the 21th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 14-15, 2004, Kyoto, The Institute of Electrical Engineers of Japan)
304.	2004/10	Development of 6-axis Motion Sensors Using Piezoelectric Elements (Proceedings of the 21th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 14-15, 2004, Kyoto, The Institute of Electrical Engineers of Japan)
305.	2004/10	Fabrication of a Micro Reciprocating Engine for Power Generation (Proceedings of the 21th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 14-15, 2004, Kyoto, The Institute of Electrical Engineers of Japan)
306.	2004/10	Fabrication of Flexible Thermopile Generator Sheet (Proceedings of the 21th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 14-15, 2004, Kyoto, The Institute of Electrical Engineers of Japan)
307.	2004/10	Microbonding of Pb(Zr,Ti)O3 Bulk Ceramics to Si Single Crystals (Proceedings of the 21th Sensor Symposium on Sensors, Micromachines, and Applied Systems, Oct. 14-15, 2004, Kyoto, The Institute of Electrical Engineers of Japan)
308.	2004/10	Noise and Frequency Analyses of a Miniaturized 3-DOF Accelerometer Utilizing Silicon Nanowire Piezoresistors ((IEEE Sensors2004) The 3rd Int''l Conference on Sensors, Oct.24-27, 2004, Vienna Univ. of Technology, Vienna, Austria, IEEE Sensors Council)
309.	2004/10	Novel-Shaped Microneedle Arrays for Multiple Uses of Bio-Medical Applications ((IEEE ICSICT2004) The 7th Int''l Conference on Solid-State and Integrated-Circuit Technology, Beijing, China (CD-ROM))
310.	2004/10	新産業創出のキーとなるMEMSテクノロジー (システム制御情報セミナー2004、大阪、システム制御情報学会)
311.	2004/09	Fabrication of Gratings on a PMMA Concave Lens Surface by Double X-ray Lithography ((IEEE MOC 2004)Proceedings, The 10th Microoptics Conference, Sept. 1-3, 2004, Friedrich-Schiller-Univ., Jena, Germany, (CD-ROM) K-6)
312.	2004/09	新産業創出のキーとなるMEMSテクノロジー (センシング技術応用研究会　第142回研究例会資料、大阪)
313.	2004/08	Design & Fabrication of Piezoresistive Six Degree of Freedom Accelerometer for Biomechanical Applications ((ICMENS2004)The International Conference on MEMS, NANO and Smart Systems, Aug.25-27, 2004, Banff, Alberta, Canada)
314.	2004/08	Dye Laser Microcavity Resonator Based on X-ray Lithography (IEEE/LEOS(Laser and Electro Optical Soc.) (Opical MEMS 2004) Int''l Conference on Optical MEMS and Their Applications, Aug. 22-26, 2004, Takamatsu, Kagawa, Japan)
315.	2004/07/26	State of the Art MEMS Technology (IEEE (IMFEDK) The 2004 International Meeting for Future of Electron Devices, Kansai, July 26-28, Kyoto Univ., Tutorial Session Lecture)
316.	2004/07	A Silicon Micromachined Six Degree of Freedom Piezoresistive Accelerometer for Biomedical Application ((APCOT MNT 2004) Asia-Pacific Conf. of Transducers and Micro-Nano Technology / (ICEE2004) Int''l Conference on Electrical Engineering 2004, July 4-8, 2004, Sapporo, Japan, Conference Proceedings, Vol.3-1)
317.	2004/07	Application of Nano-grain Composites for Fabrication of LIGA Micro-Structures Using a Pseudo-Superplasticity ((APCOT MNT 2004) Asia-Pacific Conf. of Transducers and Micro-Nano Technology / (ICEE2004) Int''l Conference on Electrical Engineering 2004, July 4-8, 2004, Sapporo, Japan, Conference Proceedings, Vol.3-1)
318.	2004/07	Design and Fabrication of Semiconductor Gas Gyroscope ((APCOT MNT 2004) Asia-Pacific Conf. of Transducers and Micro-Nano Technology / (ICEE2004) Int''l Conference on Electrical Engineering 2004, July 4-8, 2004, Sapporo, Japan, Conference Proceedings, Vol.3-1)
319.	2004/07	Design of an Ultra Small Accelerometer Utilizing Si Nanowire Piezoresistors ((APCOT MNT 2004) Asia-Pacific Conf. of Transducers and Micro-Nano Technology / (ICEE2004) Int''l Conference on Electrical Engineering 2004, July 4-8, 2004, Sapporo, Japan, Conference Proceedings, Vol.3-1)
320.	2004/07	Measurement of Loads Acting on a Near-Wall Particle in Turbulent Water Flow by Using a 6-Dof MEMS-Based Sensor ((APCOT MNT 2004) Asia-Pacific Conf. of Transducers and Micro-Nano Technology / (ICEE2004) Int''l Conference on Electrical Engineering 2004, July 4-8, 2004, Sapporo, Japan, Conference Proceedings, Vol.3-12)
321.	2004/07	Optimization of Quadruplets-Microneedle Array for Maximum Blood Extraction ((APCOT MNT 2004) Asia-Pacific Conf. of Transducers and Micro-Nano Technology / (ICEE2004) Int''l Conference on Electrical Engineering 2004, July 4-8, 2004, Sapporo, Japan, Conference Proceedings, Vol.3-1)
322.	2004/07	新産業創出のキーとなるMEMSテクノロジー (MMCファンドリーサービス産業委員会　第3回MEMS講習会「MEMSの設計・加工技術と応用例」、東京、（財）ﾏｲｸﾛﾏｼﾝｾﾝﾀｰﾌｧﾝﾄﾞﾘｰｻｰﾋﾞｽ産業委員会)
323.	2004/06	新産業創出のキーとなるMEMSテクノロジー (ｻｲﾊﾞﾈﾃｨｯｸ・ﾌﾚｷｼﾌﾞﾙ･ｵｰﾄﾒｰｼｮﾝ（CFA）研究分科会第15回例会「先端生産技術の最近の動向」、草津市、システム制御情報学会ｻｲﾊﾞﾈﾃｨｯｸ・ﾌﾚｷｼﾌﾞﾙ･ｵｰﾄﾒｰｼｮﾝ（CFA）研究分科会)
324.	2004/04	21世紀COEプログラム｢マイクロ・ナノサイエンス・集積化システム｣の概要 (センサ・アクチュエータ・マイクロマシン／ウィーク 2004 総合シンポジウム、Session 2：「マイクロ・ナノ技術１－COEと研究・開発支援」、東京ビッグサイト、次世代センサ協議会)
325.	2004/04	放射光リソグラフィーによる三次元マイクロ・ナノ構造の製作 (ナノブローブテクノロジー第167委員会第34回研究会「ビーム技術最前線」研究会資料、東京、（独）日本学術振興会)
326.	2004/04	立命館大学21世紀COEプログラム「マイクロ・ナノサイエンス・集積化システム」の紹介 (電気学会論文誌E、Vol.124、No.4)
327.	2004/03	Quadruplets-microneedle Array for Blood Extraction (NSTI(Nanotech2004) Proceeding of the 2004 Nanotechnology International Conference and Trade Show)
328.	2004/03	高密度実装用マイクロコネクタの特性評価 (第18回エレクトロニクス実装学術講演大会講演論文集)
329.	2004/02	Sensitivity Analysis for an Ultra Small Accelerometer Using Nanowire Piezoresistor (IEEE NDSI 2004, Conference Digests of the IEEE International Conference on Nanoscale Devices and System Integration)
330.	2004/01	Polymer Based Smart Flexible Thermopile for Power Generation ((MEMS 2004) Technical Digest, 17th IEEE Int''l Conference on Micro Electro Mechanical Systems)
331.	2003/12	Micro Reciprocating Engine Based on SOI Structure ((PowerMEMS 2003) 3rd International Workshop on Micro and Nano Technology for Power Generation and Energy Conversion Applications, Dec.4-5, 2003, Makuhari, Global Emerging Technology Institute(GETI) and Institute of Electrical Engineers of Japan)
332.	2003/12	Microneedle Array and Insertion Guide Array for Safe Use of Biomedical Applications (SPIE(MMN2003) Int''l Symposium on Microelectronics, MEMS, and Nanotechnology 2003, Dec. 10-12, 2003, Perth, Australia)
333.	2003/12	放射光によるナノ／マイクロマシンの作製 (応用物理学会結晶工学分科会年末講演会テキスト)
334.	2003/11	MEMS (Micro Electro Mechanical Systems) - From Research to Commercialization - ((ISC2003)Proceedings of Sensors Conference 2003, International Sensor Conference 2003, Nov.14-15, 2003, Korea Institute of Science and Technology, The Korean Sensors Society)
335.	2003/10	Application of LIGA-MA Process to Metal/Ceramics Nano-Composite Microstructure ((IUMRS-ICAM 2003) Int''l Union of Materials Research Societies, the 8th Int''l Conference on Advanced Materials, (MRS-J) The Materials Research Society of Japan, Oct. 8-13, 2003, Yokohama)
336.	2003/10	Design and Fabrication of a Coupled Microneedle Array and Insertion Guide Array for Safe Penetration through Skin (IEEE (MHS2003) Proceedings of the 2003 International Symposium on Micromechatronics and Human Science, Nagoya, Oct.19-22, 2003)
337.	2003/10	Design and Fabrication of a Resonant Micro Reciprocating Engine for Power Generation (IEEE (MHS2003) Proceedings of the 2003 International Symposium on Micromechatronics and Human Science, Nagoya, Oct.19-22, 2003)
338.	2003/10	Design and Fabrication of Flexible Thermopile for Power Generation (IEEE (MHS2003) Proceedings of the 2003 International Symposium on Micromechatronics and Human Science, Nagoya, Oct.19-22, 2003)
339.	2003/10	Fabrication and Application of 3D Micro/Nano Structures by SR Lithography (第17回日本エム・イー学会秋季大会、けいはんなプラザ、2003年10月20-22日)
340.	2003/08	Measurement of Loads Acting on a Near-Wall Particle in Turbulent Water Flow by Using a 6-DOF MEMS-Based Sensor (第8回知能メカトロニクスワークショップ講演論文集、滋賀、精密工学会)
341.	2003/08	MEMSが拓くメカトロニクスの将来 (第8回知能メカトロニクスワークショップ講演論文集、滋賀、精密工学会)
342.	2003/08	Optimization of Actual Microneedle Tip-Size Resulted from Tilt-Angle and Designed Patterns of X-ray Mask (第8回知能メカトロニクスワークショップ講演論文集、滋賀、精密工学会)
343.	2003/07	Consideration on the Properties of a Small Position Sensor with Low Temperature Drift (Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan)
344.	2003/07	Design of a Three Axis Force Sensor Based on SOI-MICS (Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan)
345.	2003/07	Fabrication of Flexible Thermopile for Power Generation (Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan)
346.	2003/07	Investigation of X-ray Mask Patterns for Fabrication of Micro Needle Array Using SR Lithography (Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan)
347.	2003/07	Measurement of Loads Acting on a Near-Wall Particle in Turbulent Water Flow by Using a 6-DOF MEMS-Based Sensor (Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan)
348.	2003/07	Micro-Structures of TiC/Ti5Si3 Composite Fabricated by LIGA-MA Process (Proceedings of the 20th Sensor Symposium on Sensors, Micromachines, and Applied Systems, July 23-24, 2003, Tokyo, The Institute of Electrical Engineers of Japan)
349.	2003/06	A MEMS-Based Microsensor to Measure All Six Components of Force and Moment on a Near-Wall Particle in Turbulent Flow ((Transducers''03)The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, IEEE)
350.	2003/06	Application of LIGA-MA Process to Metal/Ceramics Nano-Composite Microstructure ((HARMST 2003) High Aspect Ratio Micro-Structure Technology Workshop, Jun. 15-17, 2003, California, USA)
351.	2003/06	Design and Fabrication of a Resonant Micro Reciprocating Engine for Power Generation ((Transducers''03)The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, IEEE)
352.	2003/06	Elevated Temperature Tensile/Creep Test of UV-LIGA Nickel Thin Fillm for Design of High-Density Micro Cennector ((Transducers''03)The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, IEEE)
353.	2003/06	Piezoresistance Analysis of n-type 6H-SiC for High-Temperature Mechanical Sensors ((Transducers''03)The 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Boston, June 8-12, 2003, IEEE)
354.	2003/05	Fabrication of Nano-Grained TiC/Ti5Si3 Micro-Molds by the LIGA-MA Process ((IPMM-2003) The 4th Int''l Conference on Intelligent Processing and Manufacturing of Materials, May 18-23, 2003, Sendai, Japan)
355.	2003/02	SOI-MICSのデザインルールに基づく３軸フォースセンサの設計 (電気学会研究会資料、電気学会マイクロマシン・センサシステム研究会、MSS-03-4)
356.	2003/02	マイクロコネクター設計に向けたUV-LIGA Ni の高温引張り／クリープ試験の試み (電気学会研究会資料、電気学会マイクロマシン・センサシステム研究会、MSS-03-8)
357.	2003/02	マスクパターン最適化によるシンクロトロン放射光を用いたマイクロニードルアレイの作製 (電気学会研究会資料、電気学会マイクロマシン・センサシステム研究会、MSS-03-3)
358.	2003/01	Single Crystal Silicon Four-Terminal Nano-Wire Shear Stress Gauge for Nano Mechanical Sensors ((MEMS 2003) IEEE Proceedings of The 16th Annual International Conference on Micro Electro Mechanical Systems, Kyoto, Jan. 19-23, 2003, IEEE)
359.	2002/12	MEMS-Based Micro Multi-Axis Force-Moment Sensor Design, Fabrication and Application (The 7th National Congress on Mechanics, Hanoi, Dec. 18-21, 2002, Vietnam Association of Mechanics et al.)
360.	2002/12	Micro Electro Mechanical Systems (MEMS) -From Research to Industry- (Micro Electro Mechanical Systems (MEMS) -From Research to Industry-)
361.	2002/12	Simulation of Turbulent Flow Around 6-DOF Micro Sensor and Experimental Results (The 7th National Congress on Mechanics, Hanoi, Dec. 18-21, 2002, Vietnam Association of Mechanics et al.)
362.	2002/12	Synchrotron Radiation Micro Lithography and Etching (SMILE) for MEMS Fabrication (Proceedings of ISSS-SPIE 2002, International Conference on Smart Materials Structures and Systems, Dec. 12-14, 2002, Indian Instite of Science, Bangalore, India)
363.	2002/12	放射光リソグラフィーによる三次元マイクロ・ナノ構造の製作とその応用 (ナノプレシジョンエリア極微細加工技術研究会、岡山、岡山県産業振興財団)
364.	2002/11	Constant-Magnification Focusing Using a Varifocal Mirror and Its Application to 3-D Imaging (Proceedings of SPIE, Soc. Of Photo-Optical Instrumentation Engineers (Optomechatronic Systems III, Nov.12-14, 2002, Stuttgart, Germany))
365.	2002/11	Design of a Micro Reciprocating Engine for Power Generation ((Power MEMS 2002) International Workshop on Power MEMS 2002 Technical Digest, Tsukuba, Nov.12-13, 2002, Global Emerging Technology Institute et al.)
366.	2002/11	LIGA-MA-SPS　粉末焼結法による微細構造体の製作 (日本金属学会秋季大会、大阪大学、日本金属学会)
367.	2002/11	Surfacemicromachined Polysilicon-Metal Thermopile for Power Generation ((Power MEMS 2002) International Workshop on Power MEMS 2002 Technical Digest, Tsukuba, Nov.12-13, 2002, Global Emerging Technology Institute et al.)
368.	2002/10	100nm Square Single Crystal Silicon Shear Strain Gauge (IEEE MHS2002, Proceedings of the 2002 International Symposium on Micromechatronics and Human Science, Oct. 20-23, 2002, Nagoya)
369.	2002/10	A Multi-Axis Force-Moment Micro Sensor for Application in Fluid Mechanics (IEEE MHS2002, Proceedings of the 2002 International Symposium on Micromechatronics and Human Science, Oct. 20-23, 2002, Nagoya)
370.	2002/10	Fabrication of TiNi Shape Memory Alloy Micro-structures and Ceramic Micro-mold by LIGA-MA-SPS Process (IEEE MHS2002, Proceedings of the 2002 International Symposium on Micromechatronics and Human Science, Oct. 20-23, 2002, Nagoya)
371.	2002/09	放射光リソグラフィーによる三次元マイクロ・ナノ構造の製作とその応用 (平成14年度第1回放射光産業利用研究会、講演Ⅲ、広島大学、（財）中国技術振興センター)
372.	2002/07	Development and Evaluation of Multi-Axis Micro Force Moment Sensor for Application in Geophysics (MEMS 2002 Workshop Digest, Pacific Rim Workshop on Transducers and Micro/Nano Technologies, July22-24, 2002, Xiamen, China, Chinese Soc. of Micro-Nano Technology/Xiamen Univ./Pen-Tung Sah Foundation, Xiamen Univ. Press)
373.	2002/07	Fabrication of Alloy and Ceramic Microstructures by LIGA-MA-SPS Process (MEMS 2002 Workshop Digest, Pacific Rim Workshop on Transducers and Micro/Nano Technologies, July22-24, 2002, Xiamen, China, Chinese Soc. of Micro-Nano Technology/Xiamen Univ./Pen-Tung Sah Foundation, Xiamen Univ. Press)
374.	2002/07	Piezoresistance in Single Crystal Silicon Nano Wire Bridges (MEMS 2002 Workshop Digest, Pacific Rim Workshop on Transducers and Micro/Nano Technologies, July22-24, 2002, Xiamen, China, Chinese Soc. of Micro-Nano Technology/Xiamen Univ./Pen-Tung Sah Foundation, Xiamen Univ. Press)
375.	2002/07	シンクロトロン放射光リソグラフィを用いたマイクロファブリケーション技術 (第78回ラドテック研究会講演会、大阪、ラドテック研究会)
376.	2002/06	Development of Six-Degree-of Freedom Micro-Force Sensor for Applications in Geophysics (IEEE Sensors 2002, The First IEEE Int''l Conference on Sensors, June 12-14, 2002, Orlando, Florida, USA)
377.	2002/05	Design of a Reciprocating Engine for Micro Power Generator (Proceedings of the 19th Sensor Symposium on Sensors, Micromachines, and Applied Systems, May 30-31, 2002, Kyoto, Japan, The Inst. of Electrical Engineers of Japan)
378.	2002/05	Fabrication of Micro Structures Using LIGA-MA-SPS Process (Proceedings of the 19th Sensor Symposium on Sensors, Micromachines, and Applied Systems, May 30-31, 2002, Kyoto, Japan, The Inst. of Electrical Engineers of Japan)
379.	2002/05	LIGA-MA-SPS　粉末焼結法による微細構造体の製作 (粉体粉末冶金協会　平成14年度春季大会、早稲田大学、（社）粉体粉末冶金協会)
380.	2002/05	Piezoresistance Measurement in Single Crystal Silicon Nano Wires (Proceedings of the 19th Sensor Symposium on Sensors, Micromachines, and Applied Systems, May 30-31, 2002, Kyoto, Japan, The Inst. of Electrical Engineers of Japan)
381.	2002/03	シンクロトロン放射（SR）光リソグラフィーによる三次元微細構造の製作と応用 (第5回化学とマイクロシステム研究会、化学とマイクロシステム研究会、京都)
382.	2002/03	単結晶シリコンナノワイヤーブリッジのピエゾ抵抗効果の評価 (平成14年電気学会全国大会講演論文集、工学院大学、2002年3月26-29日（CD-ROM）)
383.	2002/02	LIGAプロセスによる連立撮像眼モジュール用隔壁の製作 (電気学会研究会資料、マイクロマシン・センサシステム研究会、電気学会)
384.	2002/02	精密マニピュレーションのための多軸力覚センサの製作と評価 (電気学会研究会資料、マイクロマシン・センサシステム研究会、電気学会)
385.	2002/02	粉末焼結法による微小TiNi 形状記憶合金構造体の製作 (電気学会研究会資料、マイクロマシン・センサシステム研究会、電気学会)
386.	2002/01	Six-degree of Freedom Micro Force-moment Sensor for Application in Geophysics ((MEMS2002)The 15th IEEE Int''l Conference on Micro Electro Mechanical Systems, Jan.20-24, 2002, Las Vegas, Nevada, USA)
387.	2001/12	「LIGAプロセスによる３次元微細加工」－シンクロトロン放射光を用いた構造の製作と応用－ (機能性材料の３次元微細加工技術講演会、（財）先端加工機械技術振興協会、東京)
388.	2001/12	ＳＲを用いた超微細加工 (第9回シンポジウム、原子・分子レベルで制御した材料創製とキャラクタリゼーション「超微細加工とキャラクタリゼーション」大阪電気通信大学、応用物理学会関西支部、精密工学会関西支部、他)
389.	2001/12	新産業創出のキーとなるマイクロ・ナノマシンテクノロジー (第21回研究成果の活用・事業化促進検討グループ、（社）関西経済連合会、大阪)
390.	2001/11	SMILE(Synchrotron Radiation Micro Lithography and Etching) at Ritsumeikan University (SRRC Seventh User''s Meeting ＆ Workshop, Meeting Booklet, Oct.31-Nov.2, 2001, Taiwan, Synchrotron Radiation Research Center)
391.	2001/11	Synchrotron Radiation Micro Lithography and Etching (SMILE) for MEMS Fabrication (Digest of Papers Microprocesses and Nanotechnology 2001, 2001 Int''l Microprocesses and Nanotechnology Conf. (MNC 2001), Oct.31-Nov.2, 2001, Shimane, Japan)
392.	2001/11	ＳＲ光を用いた三次元マイクロ加工（SMILE）とマイクロマシニング・試作サービス（MICS） (日本機械学会関西支部・東海支部合同企画第34回座談会資料、大阪)
393.	2001/11	放射光を利用した三次元マイクロ構造の製作と応用 (日本原子力産業会議「むつ小川原地域における放射光施設整備研究会」、札幌)
394.	2001/10	Electro-Mechanical Properties of Single Crystal Silicon Nano Wire (Proc. of the 2001, 1st IEEE Conf. on Nanotechnology (IEEE-NANO 2001), Oct. 28-30, Hawaii)
395.	2001/10	Six-degree of Freedom Piezoresistive Force-moment Micro Sensor (Proc. of the Int''l Sensor Conf. 2001, Seoul, Korea, Oct.11-12, 2001, Korean Sensors Soc./Intelligent Microsystem Center/IEEE Sensors Council)
396.	2001/10	Strategy of R＆D for Next Generation Micromachine Technology-Prospect for Manufacturing Technology- (The 7th Int''l Micromachine Symposium, Oct. 31-Nov. 1, 2001, Tokyo)
397.	2001/10	ＵＶ厚膜レジストを用いた高密度実装用マイクロコネクタの製作と特性評価 ((MES2001)第11回マイクロエレクトロニクスシンポジウム論文集、大阪大学コンベンションセンター、ＪＩＥＰ)
398.	2001/09	Fabrication of Microstructures Using Synchrotron Radiation Micro Lithography and Etching (SMILE) (MHS 2001, Int''l Symposium on Micromechatronics and Human Science, Nagoya, Japan, Sept. 9-12, 2001(Plenary))
399.	2001/09	Micro Force-Moment Sensor with Six-Degree of Freedom (MHS 2001, IEEE Proceedings of the 2001 Int''l Symposium on Micromechatronics and Human Science, Nagoya, Japan, Sept. 9-12, 2001.)
400.	2001/09	Sensitivity Analysis for a Piezoresistive Rotary Movement Micro Gyroscope (MHS 2001, IEEE Proceedings of the 2001 Int''l Symposium on Micromechatronics and Human Science, Nagoya, Japan, Sept. 9-12, 2001.)
401.	2001/08	放射光リソグラフィーによる三次元マイクロマシンの製作 (「商業化を目指した微細加工のキーテクノロジーとテクノリンケージ」精密工学会他共催、つくば)
402.	2001/08	放射光リソグラフィーによる三次元マイクロマシンの製作 (（第20回メカトロニクスフォーラム／IEEE四国フォーラム）「知能メカトロニクス専門委員会研究会報告」精密工学会他共催、香川大学)
403.	2001/06	Fabrication of Thick Film Magnetic Core with High Aspect Ratio and Long Stucture Using LIGA (HARMST ''01, Fourth Int''l Workshop on High-Aspect-Ratio Micro-Structure Technology, Baden-Baden, Germany, June 17-19, 2001.)
404.	2001/06	n-Type β-SiC Piezoresistance Analysis Under High Temperature and High Impurity Concentration (Transducers''01 Eurosensors XV, Digest of Technical Papers, The 11th International Conference on Solid-State Sensors and Actuators, Munich, Germany, June 10-14, 2001.)
405.	2001/06	Novel Shaped Microstructures Processed by Deep X-Ray Lithography (Transducers''01 Eurosensors XV, Digest of Technical Papers, The 11th International Conference on Solid-State Sensors and Actuators, Munich, Germany, June 10-14, 2001.)
406.	2001/06	Novel Shaped Microstructures Processed by Deep X-Ray Lithography Using Plane Pattern-Cross Section Transfer Technique (HARMST ''01, Fourth Int''l Workshop on High-Aspect-Ratio Micro-Structure Technology, Baden-Baden, Germany, June 17-19, 2001.)
407.	2001/06	Single Crystalline Silicon Nano Wire Piezoresistors for Mechanical Sensors (Transducers''01 Eurosensors XV, Digest of Technical Papers, The 11th International Conference on Solid-State Sensors and Actuators, Munich, Germany, June 10-14, 2001.)
408.	2001/06	Study on Three-dimensional Micromachining Using Synchrotron Radiation Etching (HARMST ''01, Fourth Int''l Workshop on High-Aspect-Ratio Micro-Structure Technology, Baden-Baden, Germany, June 17-19, 2001.)
409.	2001/05	(MICSを用いた静電型マイクロフォンの製作) (Technical Digest of the 18th Sensor Symposium 2001、電気学会、川崎)
410.	2001/05	(UV厚膜レジストを用いた高密度実装用マイクロコネクタの製作) (Technical Digest of the 18th Sensor Symposium 2001、電気学会、川崎)
411.	2001/05	(ピエゾ抵抗型円運動マイクロジャイロスコープの感度検討研究開発) (Technical Digest of the 18th Sensor Symposium 2001、電気学会、川崎)
412.	2001/05	(自立型サーモパイルの補助電源への応用) (Technical Digest of the 18th Sensor Symposium 2001、電気学会、川崎)
413.	2001/05	Micro Multi-Axis Force-Moment Sensor (Technical Digest of the 18th Sensor Symposium 2001、電気学会、川崎)
414.	2001/03	MICSプロジェクトのファウンドリーサービスの現状と課題 (平成13年電気学会全国大会講演論文集[3]、名古屋)
415.	2001/03	シリコンナノワイヤーピエゾ抵抗素子の特性評価 (日本機械学会関西支部第76期定時総会講演会講演論文集、No.014-1、摂南大学工学部)
416.	2001/03	ハイアスペクト比X線リソグラフィー（LIGA） (平成13年電気学会全国大会講演論文集[3]、名古屋)
417.	2001/03	高アスペクト比構造を用いた低G用加速度センサ (平成13年電気学会全国大会講演論文集[3]、名古屋)
418.	2001/02	SR光を用いた平面パターン－断面転写法による三次元微細構造体の製作 (電気学会マグネティックス／マイクロマシン・センサシステム合同研究会資料、草津(MAG-01-14/MSS-01-02))
419.	2001/02	シンクロトロン放射光によるPTFEのドライエッチングに及ぼす加工環境の影響 (電気学会マグネティックス／マイクロマシン・センサシステム合同研究会資料、草津(MAG-01-13/MSS-01-01))
420.	2001/01	Characteristics of Silicon Nano Wire as Piezoresistor for Nano Electromechanical Systems (The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 01))
421.	2001/01	Fabrication of Structured Thick Magnetic Film for High Frequency Magnetic Cores Using LIGA Process (Abstract of The 8th Joint MMM-Intermag Conference, San Antonio, Texas, USA.)
422.	2001/01	Thermoelectric Micro Power Generator Utilizing Self-Standing Polysilicon-Metal Thermopile (The 14th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 01))
423.	2000/12	n型β-SiCのピエゾ抵抗効果の電子輸送と変形ポテンシャル理論に基づく解析 (電気学会センサ・マイクロマシン準部門総合研究会、東京)
424.	2000/12	マイクロプロセス技術によるマイクロコネクタの製作 (電気学会センサ・マイクロマシン準部門総合研究会、東京)
425.	2000/12	単結晶シリコンナノワイヤーピエゾ抵抗素子の製作と特性評価 (電気学会センサ・マイクロマシン準部門総合研究会、東京)
426.	2000/10	Analysis of the Piezoresistive Effect in n-typeβ-SiC Based on Electron Transport and Deformation Potential Theory (IEEE Proceedings of the 2000 International Symposium on Micromechatronics and Human Science, Nagoya, Oct. 22-25, 2000)
427.	2000/10	Fabrication of Self-Supporting Polysilicon Thermopile (IEEE Proceedings of the 2000 International Symposium on Micromechatronics and Human Science, Nagoya, Oct. 22-25, 2000)
428.	2000/10	Micro Connector Fabricated by Micro Process Technology (IEEE Proceedings of the 2000 International Symposium on Micromechatronics and Human Science, Nagoya, Oct. 22-25, 2000)
429.	2000/09	Academic MEMS Commercialization Activities in Ritsumeikan University (The Commercialization of Microsystems 2000, Sept. 5-9, 2000, Santa Fe, New Mexico, USA)
430.	2000/09	サブミクロンLIGAプロセスに関する研究 (第1回マイクロマテリアルシンポジウム講演論文集、日本材料学会、東京)
431.	2000/09	シンクロトロン放射光ドライエッチングによるPTFEの三次元マイクロ加工 (第1回マイクロマテリアルシンポジウム講演論文集、日本材料学会、東京)
432.	2000/09	シンクロトロン放射光ビーム直接描画によるPTFEの三次元マイクロ加工 (第18回日本ロボット学会学術講演会予稿集、日本ロボット学会)
433.	2000/09	シンクロトロン放射光リソグラフィーによる三次元マイクロ構造の製作と応用 (2000年度砥粒加工学会学術講演会（ABTEC2000)シンポジウム「マイクロプロセッシングのすべて」砥粒加工学会)
434.	2000/09	低G用静電容量型加速度センサ構造の高アスペクト比化効果に関する検討 (第18回日本ロボット学会学術講演会予稿集、日本ロボット学会)
435.	2000/08	自立型ポリシリコン熱電変換デバイスの製作 (2000年度年次大会講演論文集、日本機械学会、名古屋)
436.	2000/07	LIGAプロセスによる高周波厚膜磁心の製作に関する研究 (電気学会研究会資料、電気学会マグネティクス研究会)
437.	2000/06	シンクロトロン放射光リソグラフィーによる三次元マイクロ構造の製作と応用 (放射光の半導体への応用技術研究委員会第44回定例会)
438.	2000/06	シンクロトロン放射光リソグラフィによる高アスペクト比マイクロマシンの製作 (大阪府立大学ニュー・フロンティア材料研究会第152回講演会「微細加工技術の新局面：新しいプロセス・新しい応用」)
439.	2000/05	A Study on the Sub-Micron LIGA Process (電気学会、Technical Digest of the 17th Sensor Symposium 2000 （川崎）)
440.	2000/05	Characteristics of Polycrystalline Si Nano Wire Piezoresistors (電気学会、Technical Digest of the 17th Sensor Symposium 2000 （川崎）)
441.	2000/05	Development of Plastic Injection Molding Using the LIGA Process (電気学会、Technical Digest of the 17th Sensor Symposium 2000 （川崎）)
442.	2000/05	Three-Dimensional Micromachining of PTFE Using Synchrotron Radiation Light (電気学会、Technical Digest of the 17th Sensor Symposium 2000 （川崎）)
443.	2000/05	シンクロトロン放射光リソグラフィによる3次元マイクロ構造の製作と応用 (超精密技術部会第117回定例会資料、東京)
444.	2000/05	マイクロプロセスにより製作したマイクロコネクタ (電気学会『第17回「センサ・マイクロマシンと応用システム」シンポジウム講演概要集』（川崎）)
445.	2000/04	シンクロトロン放射光リソグラフィーによる高アスペクト比マイクロマシンの製作 (第25回マテリアルズ・テーラリング研究会、研究会資料、東京)
446.	2000/03	ポリシリコンナノワイヤーピエゾ抵抗素子の製作 (平成12年電気学会全国大会講演論文集[3])
447.	2000/03	マイクロマシン・マルチチップサービス（MICS）の活動報告 (平成12年電気学会全国大会講演論文集[3])
448.	2000/02	センサ用薄膜内部応力のアニール効果のラマン分光法による検討 (電気学会マイクロマシン研究会、研究会資料、草津)
449.	2000/02	価電子バンドに基づくp型Siのピエゾ抵抗効果の解析 (電気学会マイクロマシン研究会、研究会資料、草津)
450.	2000/01	Direct Writing for Three-Dimensional Microfabrication Using Synchrotron Radiation Etching (Proceedings IEEE The Thirteenth Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000), Miyazaki, January 23-27, 2000)
451.	2000/01	Fabrication of Sub-Micron Structures with High Aspect Ratio for MEMS Using Deep X-Ray Lithography (Proceedings IEEE The Thirteenth Annual International Conference on Micro Electro Mechanical Systems (MEMS 2000), Miyazaki, January 23-27, 2000)
452.	2000/01	LIGAプロセスによる高アスペクト比マイクロ構造の製作 (精密工学会マイクロメカニズム専門委員会、東京)
453.	2000/01	X線リソグラフィーを用いたマイクロマシンの製作技術 (表面技術協会関西支部講演会、草津)
454.	1999/11	3-Dimensional Micromachining of PTFE Using Synchrotron Radiation Direct Photo-Etching (Proceeding of the 1999 International Symposium on Micromechatronics and Human Science, Nagoya, November 23-26, 1999)
455.	1999/11	A New Piezoresistive High Pressure Sensor Utilizing Combination of Three-Axis Normal Stress Components (Proceeding of the 1999 International Symposium on Micromechatronics and Human Science, Nagoya, November 23-26, 1999)
456.	1999/11	Fabrication of Micromotors Using LIGA Process (Proceeding of the 1999 International Symposium on Micromechatronics and Human Science, Nagoya, November 23-26, 1999)
457.	1999/11	Study on Fabrication of Sub-Micron Structures for MEMS Using Deep X-Ray Lithography (Proceeding of the 1999 International Symposium on Micromechatronics and Human Science, Nagoya, November 23-26, 1999)
458.	1999/11	円運動型マイクロジャイロスコープに関する研究 (電気学会センサ・マイクロマシン準部門平成11年度総合研究会、物理センサ研究会、研究会資料、東京)
459.	1999/10	High Aspect Ratio Micro Electro Mechanical Devices -Fabrication and Applications- (The Microsystem in Harsh Environments Workshop, Glennan Micro-systems Initiative, NASA and OAI, Cleveland, USA, Oct. 20-21, 1999)
460.	1999/09	ＳＲ光における超微細構造体の製作 (平成11年度電気学会東京支部連合研究会、光・量子デバイス研究会、研究会資料、東京)
461.	1999/09	圧電バイモルフ型マイクロバルブの製作 (平成11年度電気学会東京支部連合研究会、マイクロマシン研究会、研究会資料、東京)
462.	1999/06	A New Force Sensor Utilizing Combination of Three-Axis Stress Components (The 10th International Conference on Solid State Sensors and Actuators (Transducers''99), Digest of Technical Papers, Sendai, Japan June 7-10, 1999)
463.	1999/06	Fabrication of Sub-Micron Structures for MEMS Using Deep X-ray Lithography (Book of Abstract The Third　International Workshop on High Aspect Ratio Microstructure Technology　(HARMST''99), Kisarazu, June 13-15, 1999)
464.	1999/06	High Aspect Ratio Electrostatic Micro Actuators Using LIGA Process (Book of Abstract The Third International Workshop on High Aspect Ratio Microstructure Technology (HARMST''99), Kisarazu, June 13-15, 1999)
465.	1999/06	Isotropic Piezoresistance Properties of Polycrystalline Semiconductors (The 10th International Conference on Solid State Sensors and Actuators (Transducers''99), Digest of Technical Papers, Sendai, Japan June 7-10, 1999)
466.	1999/06	LIGA Multi-user Integration Chip Service Project (Book of Abstract The Third International Workshop on High Aspect Ratio Microstructure Technology (HARMST''99), Kisarazu, June 13-15, 1999)
467.	1999/06	バイモルフ型マイクロバルブの製作 (日本機械学会ロボティクス・メカトロニクス講演会’99、東京)
468.	1999/05	シンクロトロン放射光による精密電鋳プロセス (日本機械学会講習会「精密工学の最先端と情報通信機器への応用」、東京)
469.	1999/04	LIGAによる高アスペクト比マイクロストラクチャのセンサーへの応用 (第116回センシング技術応用研究会、研究会資料、大阪)
470.	1999/03	マルチチップサービスを用いた薄膜ダイアフラムデバイスの開発 (電気学会、マイクロマシン研究会、草津、研究会資料)
471.	1999/03	マルチユーザー集積化チップサービス（MICS)の概要 (平成11年度電気学会全国大会講演論文集(3))
472.	1999/03	低Ｇ検出用静電容量型加速度センサ (電気学会マイクロマシン研究会、草津、研究会資料MM-99-10)
473.	1999/01	Direct Drawing for Microfabrication without Photolithography (12th IEEE International Conference on Micro Electro Mechanical Systems Techical Digest)
474.	1998/12	LIGA技術の現状とマイクロマシンへの応用 (東北大学、第58回スピニクス研究会)
475.	1998/12	MICS (Multi-userIntegration Chip Service) (2nd SEMI Microsystem/MEMS Seminar,SEMI Japan 電気学会)
476.	1998/11	Multi-user Integration Chip Service Project for MEMS (Proceedings of the 1998 International Symposium on Micromechatronics and Human Science,IEEE)
477.	1998/11	マイクロマシニングを用いたセンサ・アクチュエータ研究 (岡山大学工学部、かくしん技術研究会第3回講演会)
478.	1998/11	小型SR光を用いた高アスペクト比マイクロマシン製作の研究 (佐賀県高輝度光応用技術研究会、高輝度光応用技術に関するシンポジウム)
479.	1998/10	Role of the Microfabricaiton Foundry in MEMS R&D (Proceedings of the Fourth International Micromachine Symposium,Micromachine Center)
480.	1998/08	立命館大学におけるLIGA技術の現状 (中国技術振興センター、平成10年度第9回放射線光利用研究会)
481.	1998/07	放射光を用いた高アスペクト比マイクロマシニング（LIGA） (応用物理学会　関西支部セミナー)
482.	1998/06	LIGAプロセスによる静電マイクロアクチュエーター製作の検討 (日本機械学会ロボティクス・メカトロニクス講演会'98講演論文集)
483.	1998/06	Piezoresistive Force Sensor Utilizing Combination of Three-Axis Stress Components (Technical Digest of the 16th Sensor Symposium, 電気学会)
484.	1998/06	Study on Fabrication of High Aspect Ratio Electrostatic Micro Actuators Using LIGA Process (Technical Digest of the 16th Sensor Symposium, 電気学会)
485.	1998/06	Tunable Acoustic Absorbing System Using a Micro Hole Array (Technical Digest of the 16th Sensor Symposium, 電気学会)
486.	1998/06	X-ray Mask with SiC Membrane for LIGA Process (Technical Digest of the 16th Sensor Symposium, 電気学会)
487.	1998/06	マイクロホールアレイを用いた適応吸音システム (日本機械学会ロボティクス・メカトロニクス講演会'98講演論文集)
488.	1998/04	LIGAプロセスの現状とマイクロマシンへの応用 (センサ・アクチュエータ／ウィーク'98　総合シンポジウム　Session3「マイクロセンサ」、次世代センサ協議会)
489.	1998/04	マイクロマシニングとその応用 (電気学会東京支部栃木支所講演会)
490.	1998/03	SiCメンブレンを用いたLIGAプロセス用X線マスクの製作 (平成10年電気学会全国大会講演論文集［3］)
491.	1998/03	半導体ひずみゲージのひずみ－抵抗係数とその結晶方位依存性 (平成10年電気学会全国大会講演論文集［3］)
492.	1998/02	応力の3軸成分を有効利用したピエゾ抵抗型力センサ (電気学会研究会資料（マイクロマシン研究会）)
493.	1998/01	Tunable Acoustic Absorbing Sysytem Using a deep Hole Array (Proceeding of The Eleventh Annual International Workshop on Micro Electro Mechanical Systems,IEEE)
494.	1997/11	UV厚膜レジストによる高アスペクト比マイクロストラクチャの製作 (電気学会センサ・マイクロマシン部門総合研究会資料（マイクロマシン研究会）)
495.	1997/11	シリコン圧力センサ (電気学会東海支部専門講習会－センサの基礎と応用)
496.	1997/11	マルチチップサービス初回ランで試作したアナログＩＣの報告 (電気学会センサ・マイクロマシン部門総合研究会資料（物理センサ研究会）)
497.	1997/10	Study on Fabrication of High Aspect Ratio Microparts Using the LIGA Process (Proceeding of the 1997 International Symposium on Micromechatronics and Human Science、IEEE)
498.	1997/06	A Point Mass Circular Movement Gyroscope (Technical Digest of the 15th Sensor Symposium、電気学会)
499.	1997/06	An X-ray Mask with a Low-Stress Controlled Polysilicon Membrane in Use for High Aspect Ratio Pattern Lithography (Technical Digest of the 15th Sensor Symposium、電気学会)
500.	1997/06	Design and Realization of ASIC for Silicon Gyroscopes, by Using Multi-Chip Service (Technical Digest of the 15th Sensor Symposium、電気学会)
501.	1997/06	LIGAプロセスを用いた高アスペクト比マイクロマシン製作の検討 (日本機械学会ロボティクス・メカトロニクス講演会'97　講演論文集)
502.	1997/06	Silicon IC Compatible LIGA Mask Fabrication Process (Book of Abstracts of High Aspect Ratio Micro Structure Technology(HARMST''97))
503.	1997/06	Study on Fabrication of High Aspect Ratio MEMS Microparts Using a Compact SR Beamline (Books of Abstracts of High Aspect Ratio Micro Structure Technology(HARMST''97))
504.	1997/06	マイクロストラクチャーの加工法 (日本材料学会関西支部　材料シンポジウム－マイクロマテリアルの創製とその評価)
505.	1997/05	マイクロマシニングとマイクロセンサ (第14回九州科学機器展開催記念センサフォーラム９７)
506.	1997/03	ＭＥＭＳ用高アスペクト比Ｘ線リソグラフィの研究 (1997年春季第44回応用物理学会関係連合講演会講演予稿集)
507.	1997/03	円運動型ジャイロセンサの軌跡解析 (平成9年電気学会全国大会講演論文集[3])
508.	1997/02	小型ＳＲ光ビームラインを用いた高アスペクト比マイクロマシン製作の検討 (電気学会研究会資料（マイクロマシン研究会）)
509.	1996/11	センサの集積化プロセス技術 (日本電子工業振興協会　先端機能集積システム専門委員会)
510.	1996/10	A Compact SR Beamline for Fabrication of High Aspect Ratio MEMS Microparts (Proceedings of The Seventh International Symposium on Micro Machine and Human Science, MHS''96, IEEE)
511.	1996/10	Mask Fabrication for Micro Three Dimensional Structuring by UV Laser and X-ray (3rd France-Japan congress & 1st Europe-Asia congress on Mechatronics)
512.	1996/10	ハイアスペクト比加工用マスクの作成技術 (日本機械学会第6回設計工学・システム部門講演会)
513.	1996/09	シンクロトロン放射光リソグラフィーのマイクロマシンへの応用 (日本真空工業会　'96国際真空産業展　開催記念セミナー)
514.	1996/09	マイクロマシニング応用センサ (日本機械学会第74期全国大会講演資料集)
515.	1996/07	立命館大学におけるシンクロトロン光利用研究 (Micro Process'96 先端技術フォーラムin九州－シンクロトロン光応用技術とリソグラフィ技術－、応用物理学会)
516.	1996/06	Scope for Micromachining Multi-project Chip Service in Japan (Technical Digest of the 14th Sensor Symposium, 電気学会)
517.	1996/06	マイクロマシニング技術のセンサへの応用 (マイクロマシニングプロセス研究会)
518.	1996/05	マイクロマシニング技術とその応用 (電気学会「インテリジェントセンサデバイスの技術動向」講習会)
519.	1996/05	立命館大学におけるマイクロマシニングの現状と将来 (センシング技術応用研究会　第32回薄膜センサ技術分科会)
520.	1996/01	Current and Future MEMS Application in Sensor Technology (Proceedings of Second Micro Electro - Mechanical System Workshop, Tiwan)
521.	1995/10	Integrated Sensors Using Surface Micromachining (Proceedings of IEEE Forum on Micromachine and Micromechatronics)
522.	1995/10	マイクロマシニングを応用した―センシング技術― (日本機械学会東海支部・関西支部合同企画第28回座談会資料)
523.	1995/10	マイクロマシニングを応用したマイクロセンサ (電気学会関西支部専門講習会講演論文集)
524.	1994/12	Micromachined Sensors Using Polysilicon Sacrificial Layer Etching Technology (IEEE, International Electron Devices Meeting(IEDM))
525.	1994/06	Influence of Mechanical Property of Thin Film Diaphragm on Sensitivity of Micro-Diaphragm Pressure Sensor (Tech. Dig. of the 12th Sensor Symposium 電気学会)
526.	1994/06	シリコンマイクロセンサの集積化技術 (次世代センサ協議会マイクロ理工学研究会・マイクロマシーニング研究会合同シンポジウム予稿集)
527.	1994/04	マイクロセンサのプロセス技術 (次世代センサ協議会 '94 センサ・アクチュエータ/ウィーク総合シンポジュウム, セッション2)
528.	1994/02	薄膜ダイヤフラムの機械的物性がマイクロ圧力センサの感度に与える影響の解析 (電気学会センサ技術研究会資料 ST-94-5)
529.	1993/06	Electrostatic Driven Optical Chopper Using SOI Wafer (The 7th Int. Conf. on Solid-State Sensors and Actuators(Transducers '93), IEEJ)
530.	1993/06	Integrated Pyroelectric Infrared Sensor Using PVDF Thin Film Deposited by Electro-Spray Method (The 7th Int. Conf. on Solid-State Sensors and Actuators(Transducers '93), IEEJ)
531.	1993/06	Micro-Diaphragm Pressure Sensor Using Polysilicon Sacrificial Layer Etch-Stop Technique (The 7th Int. Conf. on Solid-State Sensors and Actuators(Transducers '93), IEEJ)
532.	1993/06	センサデバイスのマイクロ化が開く新たな世界 (精密工学会第197回講習会「ここまできたマイクロアクチュエータとセンシングデバイス」テキスト)
533.	1993/05	センサとICの複合プロセス技術 (『電子情報通信学会技術研究報告』ED 93-21)
534.	1993/04/27	マイクロマシン・マイクロロボット－超小型化した機械は人間社会に何をもたらすのか－ (金沢工業大学経営科学研究所・新技術予測研究会)
535.	1993/04	Integrated Pyroelectric Infrared Sensor Using PVDF Thin Film Deposited by Electro-Spray Method (Materials Research Society (MRS) Symposium, Materials Research Society (MRS))
536.	1993/03	CoSi<ss2>2</ss2>のパワーデバイス配線への適用(I) (1993年春季第40回応用物理学関係連合講演会予稿集第2分冊)
537.	1993/03	CoSi<ss2>2</ss2>のパワーデバイス配線への適用(II) (1993年春季第40回応用物理学関係連合講演会予稿集第2分冊)
538.	1992/11	サーフェスマイクロマシーニング技術を用いたマイクロ圧力センサ (電気学会センサ技術研究会資料 ST-92-6)
539.	1992/10	マイクロマシーニングのセンサへの応用 (平成4年度電気関係学会東海支部連合大会講演論文集)
540.	1992/08	バイポーラモードSITの電流増幅率の検討 (平成4年電気学会電子・情報システム部門第2回大会講演論文集)
541.	1992/06	An Infrared Imaging Sensor Using Poly-Silicon p-n Junction Diodes (Tech. Dig. of the 11th Sensor Symposium, 電気学会)
542.	1992/05	A Normally-Off Bipolar Mode Static Induction Transistor(BSIT)with High Current Gains (The 4th International Symposium on Power Semiconductor Devices & ICs (ISPSD),IEEJ,Tokyo)
543.	1992/04/22	シリコンワンチップ集積化センサ ('92 ニューアクチュエータ＆センサシンポジウム, セッション2-5、日本能率協会)
544.	1992/02	Surface-Normal Electrostatic/Pneumatic Actuator (Proceedings of the IEEE Micro Electro Mechanical Systems Workshop)
545.	1992/01	センサのインテリジェント化 (精密工学会東海支部「設計・生産におけるインテリジェント化の基礎と実例」講習会テキスト)
546.	1992/01	圧力センサアレイの開発 (日本ロボット学会第3回ロボットセンサシンポジウム予稿集)
547.	1991/12/05	マイクロセンサ (つくば先端技術・メカトロニクスセミナー(TCI セミナー)、つくば研究支援センター)
548.	1991/11	TMAHを用いたシリコン異方性エッチング (電気学会センサ技術研究会資料)
549.	1991/10	Surface Micromachining Using Polysilicon Sacrificial Layer (Proceedings of the 2nd International Symposium on Micro Machine and Human Science)
550.	1991/10	マイクロセンサ (日本機械学会特別講議会「マイクロマシンの夢と現実－機械技術者への宿題－」資料)
551.	1991/06	Anisotropic Etching of Silicon in (CH3)4NOH Solutions (IEEE, Digest of Tech. Papers of the 6th Int. Conf. on Solid-State Sensors and Actuators (Transducers''91), San Francisco)
552.	1991/06	Digital Compensated Capacitive Pressure Sensor Using CMOS Technology for Low-Pressure Measurements (Sensors and Actuators)
553.	1991/06	Surface Micromachined Micro-diaphragm Pressure Sensors (Digest of Technical Papers of the 6th International Conference on Solid-State Sensors and Actuators(Transducers'91))
554.	1991/06	マイクロダイヤフラム圧力センサ (日本機械学会第3回電磁力関連のダイナミックスシンポジウム講演論文集)
555.	1991/06	マイクロマシーニング－ウエットエッチングのその場観察－ (日本機械学会ロボティクッス・メカトロニクス講演会'91講演論文集)
556.	1991/05	Capacitive Pressure Sensor for Low Pressure Measurements with High Overpressure Tolerance (電気学会, Tech. Dig. of the 10th Sensor Symposium)
557.	1991/05	Etch Stop Technique of Polysilicon (電気学会, Tech. Dig. of the 10th Sensor Symposium)
558.	1991/04	マイクロマシーニングのセンサへの応用 (平成3年電気学会全国大会シンポジウム講演論文集[3])
559.	1991/03	Si (100)基板上に成長したβ-SiC 単結晶の電気的特性の成長条件依存性 (1991年春季第38回応用物理学関係連合講演会予稿集第１分冊)
560.	1991/03	マイクロマシーニングのセンサへの応用 (日本機械学会第11回微小機械の要素技術の体系化に関する調査研究分科会資料)
561.	1991/01	In Situ Observation and Analysis of Wet Etching Process for Micro Electro Mechanical Systems (Proceedings of the IEEE Micro Electro Mechanical Systems Workshop)
562.	1990/12	Si 基板上に成長したβ-SiC 単結晶のの電気的特性面内分布の成長条件依存性 (電子情報通信学会シリコン材料・デバイス研究会技術研究報告)
563.	1990/11	マイクロセンサ (精密工学会第165回講習会「先端技術－マイクロマシン技術の現状と展望」テキスト)
564.	1990/10/26	マイクロマシーニングのセンサへの応用 (長野県テクノハイランド開発機構・善光寺バレー支部・センサ利用技術研究会(招待講演))
565.	1990/10	マイクロメカニズムに用いる材料の物性 (計測自動制御学会第5回流体制御部会「マイクロメカニズムと微小流体制御」講演会資料)
566.	1990/10	短絡構造SIサイリスタのスイッチング特性 (電気学会電子デバイス・半導体電力変換合同研究会資料)
567.	1990/10	半導体用薄膜材料の内部応力とヤング率測定 (日本機械学会第3回計算力学講演会論文集)
568.	1990/06	マイクロ圧力センサ (日本機械学会ロボティクス・メカトロニクス講演会'90 論文集)
569.	1990/06	β-SiC 成長表面モフォロジーへのガス流量比の影響 (電子技術総合研究所第5回SiC研究会予稿集)
570.	1990/06	水酸化アンモニウム溶液を用いたシリコン異方性エッチング (電気学会第2回シンポジウム「電磁力関連のダイナミックス」講演論文集)
571.	1990/06	微小流路における流体挙動 (日本機械学会ロボティクス・メカトロニクス講演会'90 論文集)
572.	1990/05	An Infrared Detector Using Poly-Silicon p-n Junction Diode (電気学会, Tech. Dig. of the 9th Sensor Symposium)
573.	1990/05	Anisotropic Etching of Silicon with Quaternary Ammoniumhydroxide Solutions (電気学会, Tech. Dig. of the 9th Sensor Symposium)
574.	1990/05	Micro Pressure Sensor (電気学会, Tech. Dig. of the 9th Sensor Symposium)
575.	1990/05	Pyroelectric Infrared Sensor Using PVDF Thin Film Deposited by Electro-Spray Method (電気学会, Tech. Dig. of the 9th Sensor Symposium)
576.	1990/05	β-SiC MOSダイオードの電気的特性 (電子情報通信学会電子デバイス研究会, 電子部品・材料研究会技術研究報告)
577.	1990/04	Study of Al/Thermal Oxide/β-SiC MOS Diode (IEEE, The 3rd International Coference on Amorphous and Crystalline Silicpn Carbide and Other Group IV-IV Materials (ICACSC''90), Washington DC)
578.	1990/03	TiSi2膜のコンタクト形成時における変質 (1990年春季第37回応用物理関係連合講演会予稿集(第2分冊))
579.	1990/03	マイクロマシーニングとメカニカルセンサ (電気学会全国大会講演論文集[3])
580.	1990/03	β-SiC 成長表面モフォロジーへのガス流量比の影響 (1990年春季第37回応用物理学関係連合講演会予稿集(第1分冊))
581.	1990/03	二重短絡構造SIサイリスタの特性 (平成2年電気学会平成全国大会講演論文集[5])
582.	1989/10	Mecanical Property Control of Si3N4 and Poly-Si Thin Films Using Ion Implantation Technique (電気学会産業計測制御研究会資料)
583.	1989/10	集積化圧力センサ (平成元年電気関係学会東海支部連合大会シンポジウム・最近のセンサ技術, 講演論文集)
584.	1989/08	Micromachining and Its Application for Pressure Sensors (Extended Abstracts of the 21st Conference on Solid State Devices and Materials(SSDM))
585.	1989/08	シリコン集積化圧力センサ (応用物理学会東海支部学術討論会予稿集)
586.	1989/06	Tactile Image Detection Using a 1k-element Silicon Pressure Sensor Array (Tech. Digest of the 5th Int. Conf. on Solid-State Sensors and Actuators (Transducers''89), Montreux, Switzerland)
587.	1989/05	A Fully Integrated Pressure Sensor (Tech. Dig. of the 8th Sensor Symposium)
588.	1989/05	Mechanical Property Control of LPCVD Si3N4 Micro-Diaphragm (Tech. Dig. of the 8th Sensor Symposium)
589.	1989/04	Silicon Integrated Pressure Sensors (Proc. of the 2nd Int. Forum on ASIC and Transducer Technology (ASICT''89), Toyohashi)
590.	1989/02	Mechanical Property Measurements of Thin Films Using Load-Deflection of Composite Rectangular Membrane (Proceedings of the IEEE Micro Elector Mechanical Systems Workshop)
591.	1988/12	Fablication of MOSFETs on β-SiC Single Cristalline Layers Grown on Si(100) Substrates (Proceedings of 2nd International Coference on Amorphous and Crystalline Silicpn Carbide and Other Group IV-IV Materials (ICACSC), Santa Clara, CA)
592.	1988/11	マイクロセンサ・アクチュエータ用構造材料としての薄膜の内部応力・ヤング率測定 (日本機械学会第954回材料力学講演会資料)
593.	1988/10	32×32圧力センサアレイ (電気学会研究会資料)
594.	1988/10	エンハンスメント型β-SiC MOSFETの試作 (1988年秋季第49回応用物理学会学術講演会講演予稿集(第2分冊))
595.	1988/10	圧力センサ (電気・情報関連学会連合大会論文集[3])
596.	1988/10	高電界ストレスによるLDDMOSFET の特性劣化(2) (1988年秋季第49回応用物理学会学術講演会講演予稿集(第2分冊))
597.	1988/08	High Temperature Operated Enhancement-Type β-SiC MOSFET (Extended Abst. of 20th Int.Conf. on Solid State Devices and Materials (SSDM), Japan Soc. of Appl. Phys. Tokyo)
598.	1988/07	Proton Irradiated High Speed SI-Thyristors (Proc. of the 3rd Int. Conf. on Power Electronics and Variable Speed-Drives, IEE, London, UK)
599.	1988/05	Internal Stress and Young's Modulus Measurements of Thin Films Using Micromachining Technology (電気学会, Tech. Dig. of the 7th Sensor Symposium)
600.	1988/04	High-Performance SI-Thyristor and its Application to PWM Inverter (19th Annu. IEEE Power Electronics Specialists Conf. (PESC''88), Record of conf.)
601.	1988/03	マイクロマシーニング技術を用いた薄膜の内部応力, ヤング率の測定 (1988年春季第35回応用物理学会関係連合講演会講演予稿集(第2分冊))
602.	1988/03	ライフタイム測定によるRIE ダメージ評価 (1988年春季第35回応用物理学会関係連合講演会講演予稿集(第2分冊))
603.	1988/03	β-SiC MOSFETの試作 (1988年春季第35回応用物理学会関係連合講演会講演予稿集(第3分冊))
604.	1988/03	高電界ストレスによるLDDMOSFETの特性劣化 (1988年春季第35回応用物理学会関係連合講演会講演予稿集(第2分冊))
605.	1987/10	CF4＋O2ガスを用いたβ-SiCのRIE加工 (1987年秋季第48回応用物理学会講演会講演会講演予稿集(第3分冊))
606.	1987/08	プロトン照射によるSIサイリスタの高性能化 (電気学会電子デバイス研究会資料)
607.	1987/06	High-Resolution Silicon Pressure Imager with CMOS Processing Circutis (Technical Digest of the 4th International Conference on Solid-Sensors and Actuators (Transducers'87))
608.	1987/04	シリコンマイクロセンサ (昭和62年電気学会全国大会論文集)
609.	1987/03	低オフアングルSi (100)基板上へのβ-SiC成長 (1987年春季第34回応用物理学関係連合講演会講演予稿集（第１分冊))
610.	1987/02	マイクロダイヤフラム圧力センサ (電子通信学会技術研究報告)
611.	1986/12	Micro-Diaphragm Pressure Sensor (IEEE Technical Digest of the International Electron Devices Meeting)
612.	1986/09	CMOSに与えるホットキャリアの影響 (1986年秋季第47回応用物理学会学術講演会講演予稿集)
613.	1986/09	CVD法による３インチSi基板上へのβ-SiC エピタキシャル成長 (1986年秋季第47回応用物理学会学術講演会講演予稿集)
614.	1986/05	Micro-Diaphragm Pressure Sensor (Proceedings of the 6th Sensor Symposium)
615.	1985/10	Si<ss2>3</ss2>N<ss2>4</ss2>膜を用いたマイクロロンブレン (1985年秋季第46回応用物理学会学術講演会予稿集)
616.	1985/10	シリコン圧力センサの温度特性の非直線性とその補償 (1985年秋季第46回応用物理学会学術講演会予稿集)
617.	1985/05	Nonlinear Temperature Characteristics in Silicon Piezoresistive Pressure Sensors (Proceedings of the 5th Sensor Symposium)
618.	1984/10	SiH4-N2 系を用いたプラズマシリコン窒化膜の性質 (昭和59年電子通信学会光・電波部門全国大会講演論文集)
619.	1984/05	Operation Temperature Limit of Silicon Pressure Sensor with Diffused Piezoresistors (Proceedings of the 4th Sensor Symposium)
620.	1984/03	SiH4-N2 系プラズマCVDシリコン窒化膜の特性 (第31回応用物理学関係連合講演会予稿集)
621.	1983/06	Miniature Piezoresistive Strain and Pressure Sensors with On-Chip Circuitry (Proceedings of the 3rd Sensor Symposium)
622.	1983/05	Integrated Piezoresistive Pressure Sensor with Both Voltage and Frequency OutPut (Technical Digest of the 2nd International Conference on Solid-State Sensors and Actuators (Transducers'83))
623.	1983/04	高速低損失バイポーラモードSIT(BSIT)の特性 (電子通信学会技術研究報告)
624.	1983/04	表面ゲート形ノーマリ・オフ高速静電誘導サイリスタ (電子通信学会技術研究報告)
625.	1982/12	Normally-off Type High Speed SI-Thyristor (IEEE Tech. Dig. International Electron Devices Meeting (IEDM''82), San Francisco)
626.	1982/11	強磁性磁気抵抗素子を用いた集積化磁気センサ (第６回日本応用磁気学会学術講演会講演概要集)
627.	1982/05	Integrated Magnetic Sensor (Proceedings on the 2nd Sensor Symposium)
628.	1981/05/15	半導体せん断ひずみゲージ (日本非破壊検査協会分科会資料、NDI-4581、pp.19-23)
629.	1981/04	Siのピエゾ抵抗効果を応用したせん断ゲージ (昭和56年電子通信学会総合全国大会論文集)
630.	1980	拡散型半導体圧力センサ (工業の進歩)
631.	1978/06	超小型半導体圧力変換器 (日本非破壊検査協会分科会資料)
632.	1977/01	半導体薄型ロードセル (日本非破壊検査協会第9回応力・ひずみ測定シンポジウム予稿集)
633.	1976/03	自己温度補償型半導体圧力センサ (非破壊検査)
634.	1975/10	シリコンのピエゾ抵抗効果を利用した圧力計 (電子通信学会技術研究報告)
635.	1973/03	ピエゾ抵抗効果を利用する圧力計 (第20回応用物理学関係連合講演会予稿集)
636.	1973/03	拡散型圧力計の特性 (第20回応用物理学関係連合講演会予稿集)
637.	1970/10	拡散ひずみゲージの感度 (第13回自動制御連合講演会予稿集)
638.	1970/10	拡散型圧力センサ (第13回自動制御連合講演会予稿集)